3D Laser Scanning Confocal Microscope

VK-X series

Measure Any Surface Shape

Robust Measurement Software Provides Flexibility for Analysis

Perform Profile, Height, Area and Volume Measurements

[Profile and 3D measurement]
Height, Width, Angle and Cross-section Measurement

The VK-Analyzer software can measure the height, width, cross-section, angle or radius-of-curvature of any user-specified line or curved cross-section profile.

Height, width, angle and cross-section measurement (1000×)

Height, width, angle and cross-section measurement
(1000×)

Radius-of-curvature of a micro lens (1000x)

Radius-of-curvature of a micro lens
(1000x)

Surface Area and Volume Measurement

Measures volume, surface area and surface area to area ratio of objects in any specified location on the screen.

Optical Film (1000x)

Optical Film
(1000x)

Surface Area Measurement of a Solar Battery (1000x)

Surface Area Measurement of a Solar Battery (1000x)

Evaluate and Characterize Surface Topography

[Quantify Line and Surface Roughness]
Line Roughness Measurement

Calculate roughness on a 2D or 3D image for a given line.

Evaluate and Characterize Surface Topography

Surface Roughness Measurement

Quantitatively determine differences in surface conditions by measuring the surface roughness of a target.

Film - surface roughness comparison (3000x)

Sample A: Ra 1.5 μm

Sample A: Ra 1.5 μm

Sample B: Ra 3.2 μm

Sample B: Ra 3.2 μm

Area Film Thickness Measurement function

Capture Data from the top, Bottom and Intermediate Layers of a Transparent Object

Analyze multiple layers at all points in the observation field. You can display 3D images and cross-section profiles of a selected single layer or multiple layers, and measure shapes or film thicknesses of user-specified locations.

Area Film Thickness Measurement function

Automatically Record and Measure Multiple Samples at Once

[Automatically Measures Targets that have a Repeating Pattern]
Automatic width and height measurement

Automatically measures the width and height of targets that have a repeating pattern. Since measurement is automatic, no user errors are generated, allowing for rapid, accurate measurement.

Resist Pattern (6000x)

Resist Pattern (6000x)

Optical film (1000x)

Optical film (1000x)

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