3D Laser Scanning Confocal MicroscopeVK-X series

VK-X110

Shape Measurement Laser Microscope

[Discontinued model]

This model has been discontinued.

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VK-X110 - Shape Measurement Laser Microscope

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SPECIFICATIONS

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Model

VK-X110

Type

Measurement unit

Objective lens magnification

Magnification on a 15” monitor 200x

10×

Magnification on a 15” monitor 400x

20×

Magnification on a 15” monitor 1000x

50×

Magnification on a 15” monitor 2000x

100×

Observation/
measuring range

Horizontal (H): μm Mil

Magnification on a 15” monitor 200x

1350
53.15

Magnification on a 15” monitor 400x

675
26.57

Magnification on a 15” monitor 1000x

270
10.63

Magnification on a 15” monitor 2000x

135
5.31

Vertical (V): μm Mil

Magnification on a 15” monitor 200x

1012
39.84

Magnification on a 15” monitor 400x

506
19.92

Magnification on a 15” monitor 1000x

202
7.95

Magnification on a 15” monitor 2000x

101
3.98

Working distance: mm inch

Magnification on a 15” monitor 200x

16.5
0.65"

Magnification on a 15” monitor 400x

3.1
0.12"

Magnification on a 15” monitor 1000x

0.54
0.02"

Magnification on a 15” monitor 2000x

0.3
0.01"

Numerical Aperture (N.A.)

Magnification on a 15” monitor 200x

0.3

Magnification on a 15” monitor 400x

0.46

Magnification on a 15” monitor 1000x

0.8

Magnification on a 15” monitor 2000x

0.95

Optical zoom

1x to 8x

Total magnification

200x to 16000x

Optical system for observation/measurement

Pinhole confocal optical system

Height measurement

Measuring range

7 mm 0.28"

Display resolution

0.005 µm

Repeatability σ

0.02 µm *1

Width measurement

Display resolution

0.01 µm

Repeatability 3σ

0.03 µm*2

Frame memory

Pixel count

2048 x 1536, 1024 x 768, 1024 x 64

For monochrome image

16 bit

For color image

8-bit for RGB each

For height measurement

21-bit

Frame rate

Surface scan

4 Hz to 120 Hz

Line scan

7900 Hz

Auto function

AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings

Measurement laser light source

Wavelength

Red semiconductor laser, 658 nm

Maximum output

0.95 mW

Laser Class

Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3)

Laser light-receiving element

PMT (Photoelectron Multiplier Tube)

Light source for
optical observation

Lamp

100 W halogen lamp

Color camera for
optical observation

Imaging element

1/3" Color CCD image sensor

Recording resolution

Super high resolution (3072×2304)

Auto adjustment

Gain, Shutter speed

Data processing unit

Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4

Software

Auto-focus software

This is software that automatically focuses the image during observation.

Pixel shift software

This is software that increases the number of pixels recorded by shifting pixels during image recording.

HDR function software

This is software that obtains 16-bit data to optimize the image appearance.

RPD function software

This is an algorithm that detects the measurement result quickly and accurately.

AAG function software

This is software that automatically adjusts the laser light-receiving sensitivity within the setting range.

Auto upper/lower limit setting software

This is software that automatically recognizes the upper and lower limits of the target and sets the measurement range.

Beginner mode function software

This is software that can be used to easily perform measurements as flow charts.

Comment function software

This is software that displays comments on the observation screen.

Measurement and scale display software

This is software that displays a scale on the dimension measurement and observation screen.

Rating

Power voltage

100 to 240 VAC, 50/60 Hz

Current consumption.

450 VA max.

Weight

Approx. 25 kg
(Measuring head detached: approx. 8.5 kg)

*1 When a standard height difference of 2 µm is measured with the 50x objective lens.
*2 When the KEYENCE reference chart line width of 1 µm is measured with the 100x objective lens in line peak mode (image averaging: 8 times).
*3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50.
*4 Windows 7 is a registered trademark of Microsoft, U.S.A.

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