3D Laser Scanning Confocal MicroscopeVK-X series

VK-X200K

Shape Measurement Laser Microscope

[Discontinued model]

This model has been discontinued.

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SPECIFICATIONS

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Model

VK-X200K

Type

Controller

Objective lens magnification

Magnification on a 15” monitor 100x

Magnification on a 15” monitor 200x

Magnification on a 15” monitor 400x

Magnification on a 15” monitor 1000x

Magnification on a 15” monitor 2000x

Magnification on a 15” monitor 3000x

Observation/
measuring range

Horizontal (H): μm Mil

Magnification on a 15” monitor 100x

Magnification on a 15” monitor 200x

Magnification on a 15” monitor 400x

Magnification on a 15” monitor 1000x

Magnification on a 15” monitor 2000x

Magnification on a 15” monitor 3000x

Vertical (V): μm Mil

Magnification on a 15” monitor 100x

Magnification on a 15” monitor 200x

Magnification on a 15” monitor 400x

Magnification on a 15” monitor 1000x

Magnification on a 15” monitor 2000x

Magnification on a 15” monitor 3000x

Working distance: mm inch

Magnification on a 15” monitor 100x

Magnification on a 15” monitor 200x

Magnification on a 15” monitor 400x

Magnification on a 15” monitor 1000x

Magnification on a 15” monitor 2000x

Magnification on a 15” monitor 3000x

Numerical Aperture (N.A.)

Magnification on a 15” monitor 100x

Magnification on a 15” monitor 200x

Magnification on a 15” monitor 400x

Magnification on a 15” monitor 1000x

Magnification on a 15” monitor 2000x

Magnification on a 15” monitor 3000x

Optical zoom

1x to 8x

Total magnification

200x to 24000x

Optical system for observation/measurement

Pinhole confocal optical system

Height measurement

Measuring range

7 mm 0.28"

Display resolution

0.0005 µm

Repeatability σ

0.012 µm *1

Width measurement

Display resolution

0.001 µm

Repeatability 3σ

0.02 µm *2

Frame memory

Pixel count

2048 x 1536, 1024 x 768, 1024 x 64

For monochrome image

16 bit

For color image

8-bit for RGB each

For height measurement

24-bit

Frame rate

Surface scan

4 Hz to 120 Hz

Line scan

7900 Hz

Auto function

AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings

Measurement laser light source

Wavelength

Violet laser, 408 nm

Maximum output

0.95 mW

Laser Class

Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3)

Laser light-receiving element

PMT (Photoelectron Multiplier Tube)

Light source for
optical observation

Lamp

100 W halogen lamp

Color camera for
optical observation

Imaging element

1/3" Color CCD image sensor

Recording resolution

Super high resolution (3072×2304)

Auto adjustment

Gain, Shutter speed

Data processing unit

Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4

Rating

Power voltage

100 to 240 VAC, 50/60 Hz

Current consumption.

450 VA max.

Weight

Approx 11 kg

*1 When a standard height difference of 2 µm is measured with the 50x objective lens.
*2 When the KEYENCE reference chart line width of 1 µm is measured with the 150x objective lens in line peak mode (image averaging: 8 times).
*3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50.
*4 Windows 7 is a registered trademark of Microsoft, U.S.A.

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