Wide-Area 3D Measurement SystemVR-3000 series

VR-3000K

Wide-Area 3D Measurement System Controller

VR-3000K - Wide-Area 3D Measurement System Controller

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SPECIFICATIONS

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Model

VR-3000K

Type

Controller

Head

VR-3100,VR-3050

Field-of-view

Wide-field mode

Magnification on a
15" monitor 12x

Horizontal

24.0 mm 0.94"

Vertical

18.0 mm 0.71"

Magnification on a
15" monitor 25x

Horizontal

12.0 mm 0.47"

Vertical

9.0 mm 0.35"

Magnification on a
15" monitor 38x

Horizontal

8.0 mm 0.31"

Vertical

6.0 mm 0.24"

Magnification on a
15" monitor 50x

Horizontal

Vertical

4.5 mm 0.18"

High magnification mode

Magnification on a
15" monitor 40x

Horizontal

7.6 mm 0.30"

Vertical

5.7 mm 0.22"

Magnification on a
15" monitor 80x

Horizontal

3.8 mm 0.15"

Vertical

2.9 mm 0.11"

Magnification on a
15" monitor 120x

Horizontal

2.5 mm 0.10"

Vertical

1.9 mm 0.07"

Magnification on a
15" monitor 160x

Horizontal

Vertical

1.4 mm 0.06"

Zoom

1 to 4x

Measurable height

Wide-field mode:10 mm 0.39" (±5 mm ±0.20") High magnification mode:1 mm 0.04" (±0.5 mm ±0.02")*1

Display resolution

0.1 µm(VR-3200,3100), 0.5 µm(VR-3050)*2

Repeatability (σ)

Height measurement

0.5 µm*3

Width measurement

Wide-field mode: 1 µm, High magnification mode: 0.5 µm*3

Measurement
accuracy

Height measurement

±3 µm*3

Width measurement

Wide-field mode: ±5 µm, High magnification mode: ±2 µm*3

Stitching function

Full automatic (XY stage automatic control + auto focus) measurement*4
Auto adjustment, Auto template analysis*4
Manual (XY, Z)*4

Stage

XY stroke

184 × 88 mm 7.24" x 3.46" (motorized)
70 mm 2.76" *5 (200 mm *6) (manual)

Z stroke

90 mm 3.54"(electric)

Rotation

±90°

Tilt

Over ±30°

Working distance

75 mm 2.95"

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double telecentric lens x2

Receiver lens

Double telecentric lens

Light sources

Observation light source

LED ring light (red, green, blue)(VR-3100),LED ring light (white)(VR-3050)

Measurement light source

White LED

Image size

1024 x 768 pix, 2048 x 1536 pix

Data processing

Dedicated PC specified by KEYENCE (OS: Windows 7)*7

Power source

Supply voltage

100 to 240 VAC 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature for usage

15 to 30°C 59 to 86°F

Relative humidity for usage

35 to 80% RH (No condensation)

Weight

3.8 kg

*1 Low range ±5 mm 0.20" and high range ±0.5 mm ±0.02" around the focal point position.
*2 Height measurement resolution.
*3 Value obtained using KEYENCE's specified standard gauge with measurement in KEYENCE's specified measurement mode (ambient temperature: 23±1°C 73.4±1.8°F).
*4 The stitching module (VR-H2J) is required.
*5 The VR-3050 requires the XYθ stage (OP-87715).
*6 When the OP-87717 manual slider for stitching used.
*7 Windows 7 Professional and Ultimate.

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