Wide-Area 3D Measurement SystemVR-3000 series

VR-3200

Wide-Area 3D Measurement System Head

VR-3200 - Wide-Area 3D Measurement System Head

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SPECIFICATIONS

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Model

VR-3200

Type

Head

Applicable controller

VR-3000K

Field-of-view

Wide-field mode

Magnification on a
15" monitor 12x

Horizontal

24.0 mm 0.94"

Vertical

18.0 mm 0.71"

Magnification on a
15" monitor 25x

Horizontal

12.0 mm 0.47"

Vertical

9.0 mm 0.35"

Magnification on a
15" monitor 38x

Horizontal

8.0 mm 0.31"

Vertical

6.0 mm 0.24"

Magnification on a
15" monitor 50x

Horizontal

Vertical

4.5 mm 0.18"

High magnification mode

Magnification on a
15" monitor 40x

Horizontal

7.6 mm 0.30"

Vertical

5.7 mm 0.22"

Magnification on a
15" monitor 80x

Horizontal

3.8 mm 0.15"

Vertical

2.9 mm 0.11"

Magnification on a
15" monitor 120x

Horizontal

2.5 mm 0.10"

Vertical

1.9 mm 0.07"

Magnification on a
15" monitor 160x

Horizontal

Vertical

1.4 mm 0.06"

Zoom

1x to 4x

Measurable height

Wide-field mode:10 mm 0.39" (±5 mm ±0.20") High magnification mode:1 mm 0.04" (±0.5 mm ±0.02")*1

Display resolution

0.1 µm*2

Repeatability (σ)

Height measurement

0.5 µm*3

Width measurement

Wide-field mode: 1 µm, High magnification mode: 0.5 µm*3

Measurement
accuracy

Height measurement

±3 µm*3

Width measurement

Wide-field mode: ±5 µm, High magnification mode: ±2 µm*3

Stitching function

Full automatic (XY stage automatic control + auto focus) measurement*4
Auto adjustment, Auto template analysis*4

Stage

XY stroke

184 × 88 mm 7.24" x 3.46" (motorized)

Z stroke

90 mm 3.54"(electric)

Rotation

±180°(sample rotating stage)

Tilt

±30° or more

Working distance

75 mm 2.95"

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double telecentric lens x2

Receiver lens

Double telecentric lens

Light sources

Observation light source

LED ring light (red, green, blue)

Measurement light source

White LED

Image size

1024 x 768 pixels, 2048 x 1536 pixels

Data processing

Dedicated PC specified by KEYENCE (OS: Windows 7)*5

Power source

Supply voltage

100 to 240 VAC ±10%, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature for usage

15 to 30°C 59 to 86°F

Relative humidity for usage

35 to 80% RH (no condensation)

Weight

Controller

3.8 kg

Head

28.0 kg*6

*1 Low range ±5 mm 0.20" and high range ±0.5 mm ±0.02" around the focal point position.
*2 Height measurement resolution.
*3 Value obtained using KEYENCE's specified standard gauge with measurement in KEYENCE's specified measurement mode (ambient temperature: 23±1°C 73.4±1.8°F).
*4 The stitching module (VR-H2J) is required.
*5 Windows 7 Professional and Ultimate.
*6 Weight of measurement unit: 10.8 Kg

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