Wide-Area 3D Measurement System

VR-3000 series

Select Language

Model

Controller

VR-3000K

SensorHead

VR-3200

VR-3100

VR-3050

Field-of-view

Wide-field mode

Magnification on a
15" monitor 12x

Horizontal

24.0 mm 0.94"

Vertical

18.0 mm 0.71"

Magnification on a
15" monitor 25x

Horizontal

12.0 mm 0.47"

Vertical

9.0 mm 0.35"

Magnification on a
15" monitor 38x

Horizontal

8.0 mm 0.31"

Vertical

6.0 mm 0.24"

Magnification on a
15" monitor 50x

Horizontal

Vertical

4.5 mm 0.18"

High magnification mode

Magnification on a
15" monitor 40x

Horizontal

7.6 mm 0.30"

Vertical

5.7 mm 0.22"

Magnification on a
15" monitor 80x

Horizontal

3.8 mm 0.15"

Vertical

2.9 mm 0.11"

Magnification on a
15" monitor 120x

Horizontal

2.5 mm 0.10"

Vertical

1.9 mm 0.07"

Magnification on a
15" monitor 160x

Horizontal

Vertical

1.4 mm 0.06"

Zoom

1x to 4x

Measurable height

Wide-field mode:10 mm 0.39" (±5 mm ±0.20") High magnification mode:1 mm 0.04" (±0.5 mm ±0.02")*1

Wide-field mode:10 mm 0.39" (±5 mm ±0.20")*1

Display resolution

0.1 µm*2

0.5 µm*2

Repeatability (σ)

Height measurement

0.5 µm*3

Width measurement

Wide-field mode: 1 µm, High magnification mode: 0.5 µm*3

Wide-field mode: 1 µm*3

Stitching function

Full automatic (XY stage automatic control + auto focus) measurement*4
Auto adjustment, Auto template analysis*4

Manual (XY, Z)*4

Stage

XY stroke

184 × 88 mm 7.24" x 3.46" (motorized)

70 mm 2.76" *7 (200 mm *8) (manual)

Z stroke

90 mm 3.54"(electric)

88 mm 3.46"(manual)

Rotation

±180°(sample rotating stage)

±90°(θ stage)

Tilt

±30° or more

Working distance

75 mm 2.95"

Image receiving element

4 megapixel monochrome CMOS

Transmitter lens

Double telecentric lens x2

Receiver lens

Double telecentric lens

Light sources

Observation light source

LED ring light (red, green, blue)

LED ring light (white)

Measurement light source

White LED

Image size

1024 x 768 pixels, 2048 x 1536 pixels

Data processing

Dedicated PC specified by KEYENCE (OS: Windows 7)*5

Power source

Supply voltage

100 to 240 VAC ±10%, 50/60 Hz

Power consumption

150 VA

Environmental resistance

Ambient temperature for usage

15 to 30°C 59 to 86°F

Relative humidity for usage

35 to 80% RH (no condensation)

Weight

Controller

3.8 kg

Head

28.0 kg*6

22.5 kg*6

20.6 kg*6

*1 Low range ±5 mm 0.20" and high range ±0.5 mm ±0.02" around the focal point position.
*2 Height measurement resolution.
*3 Value obtained using KEYENCE's specified standard gauge with measurement in KEYENCE's specified measurement mode (ambient temperature: 23±1°C 73.4±1.8°F).
*4 The stitching module (VR-H2J) is required.
*5 Windows 7 Professional and Ultimate.
*6 Weight of measurement unit: 10.8 Kg
*7 The VR-3050 requires the XYθ stage (OP-87715).
*8 When the OP-87717 manual slider for stitching used.

Motorized XY stage VR-S200

Model

VR-S200*1

Travel speed

10 mm 0.39"/sec. (max.)

Travel range

184×88mm 7.24" x 3.46"

Stage size

Top surface: 215 x 165 mm 8.46" x 6.50" (rotary plate: ø140 mm ø5.51")

Weight

6.5 kg

*1 Optional item mountable on VR-3100 or VR-3050.

Measurement Systems Library

Latest / Most Downloaded

    • General Catalog Request
    • Trade Shows and Exhibitions
    • eNews Subscribe

    More Series In 3D Measurement Systems

    Types In Measurement Systems

    Measurement Systems