IM-6120
[Wide-field Model]
IM-6025/6015
[General-purpose Model]
IM-6140
[High-precision Model]
Maximum Field of View Θ100×200mm Θ100mm Θ25mm
Precision Field of View Θ25×125mm Θ25mm Θ6mm
Full Field of View Repeatability W/o stage movement:
±1 μm ±0.04 Mil
With stage movement:
±2 μm ±0.08 Mil
±1 μm ±0.5 μm
Precision Field of View Repeatability W/o stage movement:
±0.5 μm ±0.02 Mil
With stage movement:
±1.5 μm ±0.06 Mil
±0.5 μm ±0.1 μm
Automatic Focus Adjustment Yes Yes