3D Interference Measurement SensorWI-5000 series

WI-S1

Dedicated stand

SPECIFICATIONS

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Model

WI-S1

XY stage moving range

X axis: 75 mm 2.95", Y axis: 50 mm 1.97"

XY stage tilt angle

±2°

Z stage moving range

Coarse movement: 64 mm 2.52", fine movement: 2.0 mm 0.08"

Dimensions(excluding moving parts)

231 (W) x 408 (H) x 360 (D) mm 9.09" (W) x 16.06" (H) x 14.17" (D)

Weight

Approx. 10 kg

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Measurement Sensors