High-speed optical micrometerLS-9000 series


Sensor Head No Monitor Function


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without monitor camera

Measurement range

0.04 mm (0.01 mm) to 6 mm 0.002" (0.0004") to 0.24"

Smallest detectable object

0.04 mm (0.01 mm) 0.002" (0.0004")

Transmitter/receiver distance

60 ±5 mm 2.36" ±0.2"


±0.03 µm*2

Measurement accuracy

±0.5 µm 0.000020"*3

Sampling cycle

16,000 samples/sec.*4

Transmitter/receiver direction and position detection

Detection area

4 × 5 mm 0.16" x 0.2"

Smallest detectable object

0.04 mm 0.002"


±0.02 mm 0.0008"*5

Sampling cycle

4,000 samples/sec.

Light source

InGaN green LED

Monitor camera

Not provided


Current consumption.

without monitor camera

Environmental resistance

Enclosure rating

IP67 (including connector)

Ambient light

Incandescent lamp/Fluorescent lamp: 3,000 lux or lower


Ambient temperature

0 to +50 °C 32 to 122 °F

Relative humidity

20 to 85 % RH (No condensation)

Environmental resistance


10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions

Shock resistance

15 G/6 ms




Transmitter: Approx. 130 g
Receiver: Approx. 280 g
Base: Approx. 180 g

*1 The values in brackets are measured in ultra-thin mode.
*2 A ±2σ margin of error when measuring a ø1.0 mm ø0.04" rod in the center of the measurement area using outer diameter mode with the average measurement number set as 2048 times.
*3 Margin of error when a moving ø1.0 mm ø0.04" rod is measured in the 2 mm × 4 mm 0.08" × 0.16" measurement area using outer diameter mode.
*4 The sampling cycle is changed by the number of OUT set, and by the use of the mutual interference prevention function.
*5 The value of ±2 when the position of a rod ø1.0 mm 0.004" is measured at the center of the measuring area while the number of averaging measurements is set to 512.

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