High-speed optical micrometerLS-9000 series


Sensor head 2-axis type


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Measurement target

ø0.04 mm to ø6 mm ø0.001" to ø0.24"

Smallest detectable object

0.04 mm 0.002"


±0.03 µm*1

Measurement accuracy

±0.5 µm 0.000020"*2

Sampling cycle

16,000 samples/sec.*3

Light source

InGaN green LED

Monitor camera

Not provided

Environmental resistance

Operating temperature range

0 to +50°C 32 to 122°F

Operating ambient humidity

20 to 85% RH (No condensation)

Operating ambientluminance

Incandescent lamp/fluorescent lamp 3,000 lux or lower


10 to 55 Hz, double amplitude 1.5 mm 0.06", 2 hours in each direction (X,Y, and Z)

Shock resistance

15G/6 ms

Enclosure rating

IP67 (including connector part)




Approx 4.8 kg

*1 A ±2σ margin of error when measuring a ø1.0 mm ø0.04" rod in the center of the measurement area using outer diameter mode with the average measurement number set as 2048 times.
*2 Margin of error when a moving ø1.0 mm ø0.04" rod is measured in the 2 mm × 2 mm 0.08" × 0.08" measurement area.
*3 The sampling cycle is changed by the number of OUT set, and by the use of the mutual interference prevention function.

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