High-speed optical micrometerLS-9000 series


Sensor head 2-axis type


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Measurement target

ø0.3 mm to ø30 mm ø0.01" to ø1.18"

Smallest detectable object

0.3 mm 0.01"


±0.1 µm 0.000004"*1

Measurement accuracy

±2 µm 0.000079"*2

Sampling cycle

16,000 samples/sec.*3

Light source

InGaN green LED

Monitor camera

Not provided

Environmental resistance

Operating temperature range

0 to +50°C 32 to 122°F

Operating ambient humidity

20 to 85% RH (No condensation)

Operating ambientluminance

Incandescent lamp/fluorescent lamp 3,000 lux or lower


10 to 55 Hz, double amplitude 1.5 mm 0.06", 2 hours in each direction (X,Y, and Z)

Shock resistance

15G/6 ms

Enclosure rating

IP67 (including connector part)




Approx 9 kg

*1 A ±2σ margin of error when measuring a ø10 mm ø0.39" rod in the center of the measurement area using outer diameter mode with the average measurement number set as 2048 times.
*2 Margin of error when a moving ø10 mm ø0.39" rod is measured in the 10 mm × 10 mm 0.39" × 0.39" measurement area.
*3 The sampling cycle is changed by the number of OUT set, and by the use of the mutual interference prevention function.

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