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Spectral-Interference Displacement Meters

Spectral-Interference Displacement Meters

Series Lineup

2 series listed below (including DISCONTINUED)

Discontinued Series:

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SI-F series Micro-head Spectral-interference Laser Displacement Meter

Introducing the world’s first micro-head, with the highest measurement accuracy in its class and a level of performance that was previously thought impossible.

SI-F80R series Handling the sensor head

With the adoption of the near-infrared SLD, thickness measurement for the wafer alone is possible even while BG tape is affixed. Even when there is strong pattern-based variation on the surface of the wafer, accurate in-line measurement is possible.