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Online Support and Services
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| Features |
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Z-Axis Surface Scanning |
Excellent Resolution of 0.3µm for High-accuracy Applications |
| For more details, download the PRODUCT CATALOG by clicking the CATALOG icon above. |
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Excellent Resolution of 0.01 Mil (0.3 µm) |
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| High-accuracy Measurement Method Uses the Confocal Principle and Tuning Fork |
| The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of a tuning fork. The beam reflected off the target surface is converged on a pinhole and then enters the light-receiving element. By measuring the exact position of the objective lens when the light enters the receiving element, the target height can be determined. The sensor measures the distance to the target surface accurately without being affected by the material, color, or angle of the target. |
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| Improved Performance |
| The coaxial optical system improves measurement performance |
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| When Focus is not Obtained On the Target Surface |
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| A small amount of received light passes through the pinhole. |
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| When Focus is Obtained on the Target Surface |
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| All of the received light passes through the pinhole. |
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Online Support and Services
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| Related Information Topics |
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| Related Product Downloads |
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Spectral-Interference Displacement Meter
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| Micro-Head Spectral-Interference Laser Displacement Meter |
SI-F Series
NEW
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| Spectral-Interference Wafer Thickness Meter |
SI-F80R Series
NEW
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| Easy Setup Guide SI Series |
SI Series
NEW
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| Laser Confocal Displacement Meter |
LT-9000 Series
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| Product catalogs and manuals include both sensor head and controller information. |
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Recommended Products!
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| LJ-G Series NEW |
| High-accuracy 2D Laser Displacement Sensor |
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| SI-F Series NEW |
| Micro-Head Spectral-Interference Laser Displacement Meter |
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 Price Info |
| Request LT-9000 Series price information. |
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