Micro-head Spectral-interference Laser Displacement MeterSI-F series


Spectroscopy Unit


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Micro-head type Spectrum unit

Measurement range

0.05 to 1.1 mm 0.002 to 0.04" *1

Light source

Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10 *2 )

Spot diameter

ø20 µm ø0.000787"*3


±0.2 µm ±0.000008" *4


0.001 µm *5

Sampling cycle

200 µs

Light source for guide

Red semiconductor laser Wavelength 650 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10 *2 )

LED display

Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange.

Temperature fluctuation

0.01% of F.S./°C

Environmental resistance

Enclosure rating


Ambient light

Incandescent lamp or Fluorescent lamp: 10,000 lux max.

Ambient temperature

0 to +35 °C 32 to 95 °F

Relative humidity

35 to 80 % RH (No condensation)

Vibration resistance

10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions




Approx. 1 kg

*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm ±0.01".
*2 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
*3 Indicates the minimum beam spot diameter within the measurement range.
*4 This value is obtained when the measurement target is a glass plate with the number of averaging measurements set to 256.
*5 This value is obtained by measuring a glass plate surface located at the center of the measurement range with the number of averaging measurements set to 4,096.

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