Micro-head Spectral-interference Laser Displacement MeterSI-F series


Sensor Head, Thickness Measurement Type


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Thickness measurement type Sensor head

Measurement range

0.05 to 1.1 mm 0.002" to 0.04" *1
(Possible detection distance : 80 to 81.1 mm 3.15" to 3.19")

Light source

Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10 *2 )

Spot diameter

ø20 µm ø0.000787"*3


±0.3 µm ±0.000012"*4


0.25 µm 0.00000984"*5

Sampling cycle

200 µs

Light source for guide

Red semiconductor laser Wavelength 650 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10 *2 )

LED display

Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange.

Temperature fluctuation

0.01% of F.S./°C

Environmental resistance

Enclosure rating


Ambient light

Incandescent lamp or Fluorescent lamp: 10,000 lux max.

Ambient temperature

0 to +50 °C 32 to 122 °F

Relative humidity

35 to 85 % RH (No condensation)

Vibration resistance

10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions




Sensor head

Spectrum unit



Approx. 39 g (including cable)

*1 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range.
*2 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
*3 Indicates the minimum beam spot diameter within the measurement range.
*4 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256.
*5 This value is obtained by measuring a glass plate surface located at the center of the measurement range with the number of averaging measurements set to 4,096.

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