Micro-head Spectral-interference Laser Displacement MeterSI-F series


Display Panel


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Main Controller Separate type*1

No. of connectable spectrum units



Minimum display unit

0.001 µm

Display range

±999.999 µm to ±9999.99 mm (7 settings selectable)

Display cycle

10 times/sec.

Terminal block

Laser remote interlock input

Non-voltage input*2

TIMING1 input

RESET1 input

Auto-zero1 input

Laser control input

Analog voltage output

±10 V x 2 outputs, Output impedance: 100 Ω*2

Analog current output

4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*2

Alarm output

NPN open-collector output (N.C.)*2

General comparator output

NPN open-collector output*2

Expansion connector

TIMING2 input

Non-voltage input*2

RESET input

Auto-zero input

Program switch input

Non-voltage input x 3 inputs*2

Alarm output

NPN open-collector output (N.C.)*2

Comparator/ binary output

Binary output

Measured value data output (21 bits) OUT selectable NPN open-collector output*2

Strobe output

NPN open-collector output*2

Binary selection output

Binary selection input

Non-voltage input*2

RS-232C interface

Measured data output and control input/output (Baud rate selectable to 115,200 bps max.)

USB interface

USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible)

Ethernet interface


Major functions

12 Out simultaneous measurement
calculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
interferometer mode, mask, connection of setting support software, etc.


Power voltage

24 VDC ±10 %, Ripple (P-P) 10 % or less

Current consumption.

One head connected: 0.6 A or less. Six heads connected: 1.5 A or less.


Ambient temperature

0 to +50 °C 32 to 122 °F*3

Relative humidity

35 to 85 % RH (No condensation)

Environmental resistance


10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions


Approx. 600 g

*1 The SI-F1001 can be used independently. The measured value display and setting change can be done with the display panel (SI-FD500) and setup support software (SI-H1).
*2 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
• Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
• Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
devices. For details, refer to "Precautions on wiring".
*3 When two or more expansion controllers are connected, the ambient temperature is 0 to +40 °C 32 to 104 °F.

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