Micro-head Spectral-interference Laser Displacement Meter

SI-F series

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Model

SI-F01

SI-F10

SI-F80

Type

Micro-head type Sensor head

Long distance type Sensor head

Thickness measurement type Sensor head

Measurement range

0.05 to 1.1 mm 0.002" to 0.04" *1

11.3 to 12.35 mm 0.04" to 0.49" *1

0.05 to 1.1 mm 0.002" to 0.04" *6
(Possible detection distance : 80 to 81.1 mm 3.15" to 3.19")

Light source

Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10 *2 )

Spot diameter

ø20 µm ø0.000787"*3

ø40 µm ø0.001575"*3

ø20 µm ø0.000787"*3

Linearity

±0.3 µm ±0.000012"*4

±0.3 µm ±0.000012"*7

Resolution

0.25 µm 0.00000984"*5

Sampling cycle

200 µs

Light source for guide

Red semiconductor laser Wavelength 650 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10 *2 )

LED display

Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange.

Temperature fluctuation

0.01% of F.S./°C

Environmental resistance

Enclosure rating

IP67

IP64

Operating ambientluminance

Incandescent lamp or fluorescent lamp: 10000 lux max.

Operating temperature range

0 to +85°C 32°F to 185°F

0 to +40℃ 32°F to 104°F

0 to +50°C 32 to 122°F

Operating ambient humidity

35 to 85%RH (No condensation)

Vibration

10 to 55 Hz, 1.5 mm 0.02" double amplitude in X, Y, and Z directions, 2 hours respectively

Material

SUS

Material

Sensor head

Spectrum unit

Polycarbonate

Weight

Approx. 24 g (including cable)

Approx. 38 g (including cable)

Approx. 39 g (including cable)

*1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm ±0.01".
*2 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
*3 Indicates the minimum beam spot diameter within the measurement range.
*4 This value is obtained when the measurement target is a glass plate with the number of averaging measurements set to 256.
*5 This value is obtained by measuring a glass plate surface located at the center of the measurement range with the number of averaging measurements set to 4,096.
*6 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range.
*7 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256.

Model

SI-F1001V

SI-FA100*4

Separate type

SI-F1001/SI-FD500

SI-FA100

Type

Built-in main controller type

Expansion controller*5

No. of connectable spectrum units

2

1

Display

Minimum display unit

0.001 µm

N/A

Display range

±999.999 µm to ±9999.99 mm (7 settings selectable)

Display cycle

10 times/sec.

Terminal block

Laser remote interlock input

Non-voltage input*1

N/A*1

TIMING1 input

RESET1 input

Auto-zero1 input

Laser control input

Analog voltage output

±10 V x 2 outputs, Output impedance: 100 Ω*1

±10 V x 1 output, Output impedance: 100 Ω*1

Analog current output

4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*1

4 to 20 mA x 1 output, Maximum load resistance: 350 Ω*1

Alarm output

NPN open-collector output (N.C.)*1

N/A*1

General comparator output

NPN open-collector output*1

Expansion connector

TIMING2 input

Non-voltage input*1

RESET input

Auto-zero input

Program switch input

Non-voltage input x 3 inputs*1

Alarm output

NPN open-collector output (N.C.)*1

Comparator/ binary output

Binary output

Measured value data output (21 bits) OUT selectable NPN open-collector output*1

Strobe output

NPN open-collector output*1

Binary selection output

Binary selection input

Non-voltage input*1

RS-232C interface

Measured data output and control input/output (Baud rate selectable to 115,200 bps max.)

N/A

USB interface

USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible)

Ethernet interface

100Base-TX/10Base-T

Major functions

12 Out simultaneous measurement
calculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
interferometer mode, mask, connection of setting support software, etc.

Rating

Power voltage

24 VDC±10% Ripple 10% (P-P) max.

Supplied from the main controller

Current consumption.

One head connected: 0.6 A or less. Six heads connected: 1.5 A or less.

Environmental resistance

Operating temperature range

0 to +50°C 32 to 122°F *2

Operating ambient humidity

35 to 85%RH (No condensation)

Vibration

10 to 55 Hz, 0.5 mm 0.02" double amplitude in X, Y, and Z directions, 2 hours respectively*3

Weight

Approx 600 g

Approx 300 g

*1 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
• Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
• Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
devices. For details, refer to "Precautions on wiring".
*2 When two or more expansion controllers are connected, the ambient temperature is 0 to 40°C 32 to 104°F.
*3 When two or more expansion controllers are connected, the vibration resistance is "10 to 55 Hz, 0.3 mm 0.01" double amplitude in X, Y, and Z directions, 2 hours respectively".
*4 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3).
*5 Up to four expansion controllers can be connected to the main controller.

Model

SI-H1

Applicable OS

Windows Vista*1/ Windows XP*2/
Windows 2000 Professional*3

Type

SI-Navigator

Required free space on hard disk

1 GB or larger

Required display

1024 x 768 pixels, 24-bit full color or higher

CPU

Pentium III, 1 GHz or higher (1.7 GHz or higher is recommended)

Memory capacity

256 MB or higher (1 GB or more is recommended)

PC interface

One of the following interfaces is required.
- USB: Revision 2.0, high-speed (full speed in USB1.1 compatible mode)*4
- LAN: 100BASE-TX or 10BASE-T*5
- RS-232C (serial port)

*1 Ultimate, Business, Home Premium and Home Basic editions are supported.
*2 Professional SP2 and later versions and Home Edition SP2 and later versions are supported.
*3 SP4 and later versions are supported.
*4 Connections via a USB hub are not supported.
*5 Connections via an in-house LAN or a router are not supported. Direct or local connections must be used.

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