Spectral-Interference Wafer Thickness Meter

SI-F80R series

Accurately Measure Wafer Thickness

The SI-F80R Series employs a near-infrared SLD that can penetrate through Si, GaAs, SiC, InP, a-Si, and other semiconductors. It can accurately measure wafer thickness, even when covered with BG (backgrind) tape.

SI-F80R

Accurately Measure Wafer Thickness

Best in its Class Specifications

Best in its Class Specifications

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Measurement Sensors