Spectral-Interference Wafer Thickness MeterSI-F80R series


Controller, Not Subject to Export Control, with Display Unit


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Separate type



Built-in main controller type

No. of connectable spectrum units



Minimum display unit

0.001 µm

Display range

±999.999 µm to ±9999.99 mm (7 settings selectable)

Display cycle

10 times/sec.

Terminal block

Laser remote interlock input

Non-voltage input*1

TIMING1 input

RESET1 input

Auto-zero1 input

Laser control input

Analog voltage output

±10 V x 2 outputs, Output impedance: 100 Ω*1

Analog current output

4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*1

Alarm output

NPN open-collector output (N.C.)*1

General comparator output

NPN open-collector output*1

Expansion connector

TIMING2 input

Non-voltage input*1

RESET input

Auto-zero input

Program switch input

Non-voltage input x 3 inputs*1

Alarm output

NPN open-collector output (N.C.)*1

Comparator/ binary output

Binary output

Measured value data output (21 bits) OUT selectable NPN open-collector output*1

Strobe output

NPN open-collector output*1

Binary selection output

Binary selection input

Non-voltage input*1

RS-232C interface

Measured data output and control input/output (Baud rate selectable to 115,200 bps max.)

USB interface

USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible)

Ethernet interface


Major functions

12 Out simultaneous measurement
calculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
interferometer mode, mask, connection of setting support software, etc.


Power voltage

24 VDC±10% Ripple 10% (P-P) max.

Current consumption.

One head connected: 0.6 A or less. Six heads connected: 1.5 A or less.

Environmental resistance

Operating temperature range

0 to +50°C 32 to 122°F *2

Operating ambient humidity

35 to 85%RH (No condensation)


10 to 55 Hz, 0.5 mm 0.02" double amplitude in X, Y, and Z directions, 2 hours respectively*3


Approx 600 g

*1 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
• Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
• Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
devices. For details, refer to "Precautions on wiring".
*2 When two or more expansion controllers are connected, the ambient temperature is 0 to 40°C 32 to 104°F.
*3 When two or more expansion controllers are connected, the vibration resistance is "10 to 55 Hz, 0.3 mm 0.01" double amplitude in X, Y, and Z directions, 2 hours respectively".

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