Spectral-Interference Wafer Thickness Meter
SI-F80R series
Sensor Head, Wafer Thickness Measurement Type SI-F80R
*Please note that accessories depicted in the image are for illustrative purposes only and may not be included with the product.
Specifications
Model | SI-F80R*1 | |||
Type | Wafer thickness measurement type Sensor head | |||
Measurement range | 10 to 310 µm 0.000394" to 0.0122" (when n=3.5)*2 | |||
Possible detection distance | 80 to 81.1 mm 3.15" to 3.19" | |||
Light source | Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10*3) | |||
Spot diameter | ø25 µm ø0.000984"*4 | |||
Linearity | ±0.1 µm ±0.000004" (when n=3.5)*5 | |||
Resolution | 0.001 µm *6 | |||
Sampling cycle | 200 µs | |||
LED display | Target near center of measurement range : green lights. Target within measurement range : orange lights. | |||
Temperature fluctuation | ― | |||
Environmental resistance | Enclosure rating | IP64 | ||
Ambient light | Incandescent lamp or Fluorescent lamp: 10,000 lux max. | |||
Ambient temperature | 0 to +50 °C 32 to 122 °F | |||
Relative humidity | 35 to 85 % RH (No condensation) | |||
Vibration resistance | 10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions | |||
Material | SUS | |||
Weight | Approx. 70 g (including cable) | |||
*1 The sensor head and spectrum unit are calibrated as a pair. They are not interchangeable. |