Spectroscopy Unit SI-F80RU

Model

SI-F80RU

Type

Wafer Thickness Measurement Type Spectrum Unit

Measurement range

10 to 310 µm 0.000394" to 0.0122" (when n=3.5)^*1

Possible detection distance

80 to 81.1 mm 3.15" to 3.19"

Light source

Infrared SLD Output 0.6 mW, Class 1 Laser Product (IEC60825-1, FDA (CDRH) Part 1040.10^*2)

Spot diameter

ø25 µm^*3

Linearity

±0.1 µm ±0.000004" (when n=3.5)^*4

Resolution

0.001 µm ^*5

Sampling cycle

200 µs

LED display

Target near center of measurement range : green lights. Target within measurement range : orange lights.
Target outside measurement range : flashes orange.

Temperature fluctuation

0.01% of F.S./°C

Environmental resistance

Enclosure rating

-

Ambient light

Incandescent lamp or Fluorescent lamp: 10,000 lux max.

Ambient temperature

0 to +35 °C 32 to 95 °F

Relative humidity

35 to 80 % RH (No condensation)

Vibration resistance

10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions

Material

Polycarbonate

Weight

Approx. 1.2 kg