Spectral-Interference Wafer Thickness MeterSI-F80R series

SI-FA100

Head Extension Unit

SPECIFICATIONS

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Model

SI-FA100*1

Type

Expansion controller*2

No. of connectable spectrum units

1

Display

Minimum display unit

N/A

Display range

Display cycle

Terminal block

Laser remote interlock input

N/A*3

TIMING1 input

RESET1 input

Auto-zero1 input

Laser control input

Analog voltage output

±10 V x 1 output, Output impedance: 100 Ω*3

Analog current output

4 to 20 mA x 1 output, Maximum load resistance: 350 Ω*3

Alarm output

N/A*3

General comparator output

Expansion connector

TIMING2 input

RESET input

Auto-zero input

Program switch input

Alarm output

Comparator/ binary output

Binary output

Strobe output

Binary selection output

Binary selection input

RS-232C interface

N/A

USB interface

Ethernet interface

Major functions

12 Out simultaneous measurement
calculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
interferometer mode, mask, connection of setting support software, etc.

Rating

Power voltage

Supplied from the main controller

Current consumption.

Environmental resistance

Operating temperature range

0 to +50°C 32 to 122°F *4

Operating ambient humidity

35 to 85%RH (No condensation)

Vibration

10 to 55 Hz, 0.5 mm 0.02" double amplitude in X, Y, and Z directions, 2 hours respectively*5

Weight

Approx 300 g

*1 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3).
*2 Up to four expansion controllers can be connected to the main controller.
*3 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
• Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
• Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
devices. For details, refer to "Precautions on wiring".
*4 When two or more expansion controllers are connected, the ambient temperature is 0 to 40°C 32 to 104°F.
*5 When two or more expansion controllers are connected, the vibration resistance is "10 to 55 Hz, 0.3 mm 0.01" double amplitude in X, Y, and Z directions, 2 hours respectively".

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