Spectral-Interference Wafer Thickness MeterSI-F80R series


Head Extension Unit, Not Subject to Export Control


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Separate type


Expansion controller*1

No. of connectable spectrum units



Minimum display unit


Display range

Display cycle

Terminal block

Laser remote interlock input


TIMING1 input

RESET1 input

Auto-zero1 input

Laser control input

Analog voltage output

±10 V x 1 outputs, Output impedance: 100 Ω*2

Analog current output

4 to 20 mA x 1 output, Maximum load resistance: 350 Ω*2

Alarm output


General comparator output

Expansion connector

TIMING2 input

RESET input

Auto-zero input

Program switch input

Alarm output

Comparator/ binary output

Binary output

Strobe output

Binary selection output

Binary selection input

RS-232C interface


USB interface

Ethernet interface

Major functions

12 Out simultaneous measurement
calculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
interferometer mode, mask, connection of setting support software, etc.

Environmental resistance

Operating temperature range

0 to +50°C 32 to 122°F *3

Operating ambient humidity

35 to 85%RH (No condensation)


10 to 55 Hz, 0.5 mm 0.02" double amplitude in X, Y, and Z directions, 2 hours respectively*4


Approx 300 g

*1 Up to four expansion controllers can be connected to the main controller.
*2 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
• Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
• Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
devices. For details, refer to "Precautions on wiring".
*3 When two or more expansion controllers are connected, the ambient temperature is 0 to 40°C 32 to 104°F.
*4 When two or more expansion controllers are connected, the vibration resistance is "10 to 55 Hz, 0.3 mm 0.01" double amplitude in X, Y, and Z directions, 2 hours respectively".

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