Spectral-Interference Wafer Thickness MeterSI-F80R series
Windows Vista*1/ Windows XP*2/
Required free space on hard disk
1 GB or larger
1024 x 768 pixels, 24-bit full color or higher
Pentium III, 1 GHz or higher (1.7 GHz or higher is recommended)
256 MB or higher (1 GB or more is recommended)
One of the following interfaces is required.
*1 Ultimate, Business, Home Premium and Home Basic editions are supported.