Spectral-Interference Wafer Thickness MeterSI-F80R series


PC Software


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Applicable OS

Windows Vista*1/ Windows XP*2/
Windows 2000 Professional*3



Required free space on hard disk

1 GB or larger

Required display

1024 x 768 pixels, 24-bit full color or higher


Pentium III, 1 GHz or higher (1.7 GHz or higher is recommended)

Memory capacity

256 MB or higher (1 GB or more is recommended)

PC interface

One of the following interfaces is required.
- USB: Revision 2.0, high-speed (full speed in USB1.1 compatible mode)*4
- LAN: 100BASE-TX or 10BASE-T*5
- RS-232C (serial port)

*1 Ultimate, Business, Home Premium and Home Basic editions are supported.
*2 Professional SP2 and later versions and Home Edition SP2 and later versions are supported.
*3 SP4 and later versions are supported.
*4 Connections via a USB hub are not supported.
*5 Connections via an in-house LAN or a router are not supported. Direct or local connections must be used.

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