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Online Support and Services
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SI-F Series ApplicationsUnbeatable Performance in Automation and Sensing Applications. |
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For more details, download the PRODUCT CATALOG by clicking the CATALOG icon above. |
Measuring wafer thickness |
| The micro-head can be used to measure the thickness and warpage of high-precision objects such as silicon wafers. |
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[ADVANTAGE]
Ultra high-resolution |
| Resolution of 0.001 μm 0.00004 mil |
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| Multifunctional controller |
| The arithmetic operation circuit instantly converts the measurement data to a thickness. |
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| No heat generation |
| There are no electrical components in the head that generate heat. |
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Measuring the behavior of rollers in a copy machine |
| The micro-head can be used to measure the behavior of each component inside precision machines such as copy machines. |
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[ADVANTAGE]
ø2 mm ø0.08" micro-head |
| No special location is needed for installation. |
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| Heat resistant to 85°C 185°F |
| Measurement is possible even beside an exothermic body. |
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| 5-kHz high-speed sampling |
| Even high-speed targets can be measured securely. |
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Positioning high-accuracy stages |
| The micro-head can be used to detect the location at which a stage stops, allowing the difference from the reference value to be fed back to the related equipment. |
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[ADVANTAGE]
Setting distance of 10 mm 0.39" or longer |
| There is no danger of collision. |
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| Up to six-axis simultaneous measurement |
| Multi-axis control is achieved with no time errors |
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| ø8 mm ø0.47" small head |
| No special location is needed for installation. |
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Measuring roller run out with high accuracy |
| The micro-head can be used to measure the run out in rollers, which demand precise measurement, such as in the case of coating rollers. |
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[ADVANTAGE]
No damage to workpiece |
| Non-contact measurement prevents damage to workpieces. |
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| Direct indication of amount of run out |
| The amount of run out is instantly calculated and displayed by the controller. |
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| 5-kHz high-speed sampling |
| The high-speed rotation of target objects can be followed. |
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Measuring exposure mask gaps |
| The micro-head can be used to measure the gap between an exposure mask and glass substrate. |
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[ADVANTAGE]
Setting distance of 80 mm 3.15" |
| The micro-head can be installed even when the mask is thick. |
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| ø12mm ø0.47" small head |
| No special location is required for installation. |
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| No heat generation |
| There are no electrical components in the head to generate heat. |
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Measuring the thickness of glass discs |
| The micro-head can be used to measure the thickness of optically transparent targets, such as glass discs. |
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[ADVANTAGE]
Ultra high-resolution |
| Resolution of 0.001 μm 0.0004 mil |
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| 5-kHz high-speed sampling |
| The thickness of rapidly rotating targets can be measured. |
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| Up to six-axis simultaneous measurement |
| Multi-axis control is achieved with no time errors. |
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Online Support and Services
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| Related Information Topics |
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| Related Product Downloads |
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| Product catalogs and manuals include both sensor head and controller information. |
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| LJ-G Series NEW |
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