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SI-F Series Micro-Head Spectral-Interference Laser Displacement Meter
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Features

Best Resolution & Micro Head Size

For more details, download the PRODUCT CATALOG by clicking the CATALOG icon above.

[World's Smallest] Micro Head Size

SI-F01 Technical Data
SI-F01 Technical Data

Best-in-its-class Resolution: 1nm 0.00004 mil

A dedicated mode is supported, in which the maximum possible high-accuracy measurement can be attained by applying the principle of interferometry. This will satisfy the need for further high-accuracy measurements at the nanometer level.

Interferometer Mode
Example (number of averages set to 1)

Resolution
Resolution
Linearity
Linearity

No Heat Generation and No Noise

Advantages of the optical fiber head structure
The measurement head consists of only optical fibers and lenses, with no electronic parts.
No heat generation and no noise
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