|
|
 |
|
|
Online Support and Services
|
|
|
|
|
|
|
| Specifications |
|
|
|
SI-F80R Series Spectral-Interference Wafer Thickness Meter |
Best in Class Performance with the Specifications to Back it Up. |
| For more details, download the PRODUCT CATALOG by clicking the CATALOG icon above. |
|
|
| Specifications: Wafer thickness measurement type |
|
|
|
The sensor head and spectrum unit are calibrated as a pair. They are not interchangeable.
1. Indicates the thickness measurement range when the refractive index is 3.5. (The thickness measurement range is 35 to 1100 μm 1.38 to 43.31 mil when the refractive index is 1.)
2. Indicates the minimum beam spot diameter within the measurement range.
3. This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256, converted to a refractive index of 3.5.
4. This value is obtained by measuring a 0.3 mm 0.01" thick glass target within the possible detection distance with the number of averaging measurements set to 4096.
5. The laser classification for FDA is based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50. |
|
|
|
|
Online Support and Services
|
|
|
|
|
|
|
|
|
|
|
|
|
| Related Information Topics |
|
|
|
|
| Related Product Downloads |
|
 |
Spectral-Interference Displacement Meter
|
|
| Micro-Head Spectral-Interference Laser Displacement Meter |
SI-F Series
NEW
|
|
 |
|
 |
|
 |
 |
| Spectral-Interference Wafer Thickness Meter |
SI-F80R Series
NEW
|
|
|
|
|
|
|
|
| Easy Setup Guide SI Series |
SI Series
NEW
|
|
|
 |
|
|
|
|
| Laser Confocal Displacement Meter |
LT-9000 Series
|
|
|
|
|
 |
|
|
|
|
| Product catalogs and manuals include both sensor head and controller information. |
|
|
|
Recommended Products!
|
|
|
|
|
|
| LJ-G Series NEW |
| High-accuracy 2D Laser Displacement Sensor |
|
|
 |
 Price Info |
| Request SI-F80R Series price information. |
|
|
|
|
|
|
|
