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Spectral-Interference Displacement Meter
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| Spectral-Interference Displacement Meter |
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[Best in its Class] Resolution: 1nm (0.00004 mil) |
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[World's Smallest] Micro Head Size: ø2 mm (ø0.08") |
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[First in the Industry] Measurement principle: Spectral interference method |
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Simultaneous Control of up to Six Heads |
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Multi-calculation |
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The Controller is Equipped with Six Different I/O Interfaces |
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PC Software Dedicated to Ease of Use and Data Collection |
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Wafer thickness can be measure even if back grinding tape is affixed |
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Minimal pattern influence |
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In-line measurement is possible |
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Automatically maps the distribution of thickness for the entire wafer |
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High-Accuracy Surface Scanning Method |
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Excellent resolution of 0.01 Mil (0.3 µm) |
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Quick and easy setup functions |
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Multiple measurement modes for a wide range of applications |
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Online Support and Services |
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| Keyence Technical eNews |
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 Price Info |
| Request Spectral-Interference Displacement Meter price information. |
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| Free Trial Unit |
| Try the Spectral-Interference Displacement Meter free of charge. |
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