Digital MicroscopeVHX-500F series
Epi-illumination Lens (1000X)
0 to 2.0 mm0" to 0.079"
Non-contact type observation distance
By applying KEYENCE's proprietary optical systems, we have given this product a slim body even though the product uses vertical illumination. With this product, it is possible to observe metal structures and the surfaces of semiconductors in detail, which was difficult to do with conventional flanking illumination.
*1 Magnification on a 15" monitor.