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COLOR 3D Violet Laser Scanning Microscope VK-9700
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Case Study : Quick and Precise Measuring Functions Significantly Reduce Investigation Time
Features

Other Measurement Applications and Functions

For more details, download the PRODUCT CATALOG by clicking the CATALOG icon above.

Thickness measurement of transparent films
The peak (focal point) on transparent or translucent films is difficult to detect with a non-confocal microscope.
However, the VK-9700 accurately detects the peak. The thickness of a transparent or translucent body is measured non-destructively.
Thickness measurement of transparent films
In the case of transparent targets, transmitted light goes through the peak (focal spot) on the front face and detects the peak (focal spot) on the rear face. The difference in both peak positions can be measured. (film thickness)

Automatic pattern width measurement
Automatically measures the width and height of regular patterns on targets such as semiconductor, display or optical parts.
The automatic pattern width measurement eliminates errors owing to manual operations and shortens the measurement time.
Automatic pattern width measurement
　　　　　　　　Resist pattern (6000x)

Histogram / Binarization
Color, Light intensity and High-low of the measured image data appear in histograms.
Area or area ratio data relevant to an arbitrarily set threshold can be measured. Additionally, various measurements are possible on binarized images with an arbitrarily set threshold.
Color CCD (3000x)
Histogram display
Histogram display

Binarized measurement results
Binarized measurement results

DLL (Dynamic Link Library)
Responds to external remote controls.
Using the VK Series online or with the electric stage incorporated measures any point on a target continuously.
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