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FW Series Ultrasonic Sensors
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Applications

Semiconductor/ Electronics/ Electrical Industry

Unbeatable Ultrasonic Sensors Performance for all Applications.

For full details, download the PRODUCT CATALOG using the CATALOG icon in the Online Support and Services box above
Detecting wafers in the cleansing process

Detecting wafers in the cleansing process
Reliable detection of sweating wafers is ensured even in a vaporous atmosphere immediately after the slicing process.
Detecting slit substrates in the transfer process
Detecting slit substrates in the transfer process
Due to the colors and slits of the substrate, instability and chattering of outputs have been inevitable with conventional photoelectric sensors. The FW Series ensures reliable detection unaffected by colors and small slits.
Controlling web tension
Controlling web tension
Due to transparency and surface irregularities, detection with photoelectric sensors has been difficult. The FW Series ensures reliable detection unaffected by projections and depressions. In addition, the two outputs can be used for making outputs of upper and lower limits separately.
Detecting wafers from an angle
Detecting wafers from an angle
Detection has been difficult because of the minute height difference between the thin wafer and background. The FW Series ensures reliable detection by applying ultrasonic waves from an angle to cause slight reflections from the edge.
Detecting wafers in a magazine rack
Detecting wafers in a magazine rack
The FW Series is used to detect the remaining wafers. Detection with reflective-type sensors has been difficult because the light was absorbed by the surface film of the wafers. The FW Series is not affected by surface films or glossy backgrounds.
Controlling the fluid level of a cleaning solution
Controlling the fluid level of a cleaning solution
The FW Series is used for controlling the liquid level. The two outputs can be used for making outputs of upper and lower limits separately. In addition, the special liquid level detection mode enables various controls with simple setup.
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