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LT-9000 Series Surface scanning Displacement Meter
Online Support and Services
Features

Z-Axis Surface Scanning

Accuracy 10 Times Higher than Conventional Models

For full details, download the PRODUCT CATALOG using the CATALOG icon in the Online Support and Services box above
Z axis scanning for ultra high resolution

Excellent Resolution of 0.0004 Mil (0.01 µm)

High-accuracy Measurement Method Uses the Confocal Principle and Tuning Fork
The laser beam is focused on the target surface through an objective lens that vibrates up and down at high speed by means of a tuning fork. The beam reflected off the target surface is converged on a pinhole and then enters the light-receiving element. By measuring the exact position of the objective lens when the light enters the receiving element, the target height can be determined. The sensor measures the distance to the target surface accurately without being affected by the material, color, or angle of the target.
High angular characteristics

Improved Performance
The coaxial optical system improves measurement performance
When Focus is not Obtained On the Target Surface
Focus not obtained on target surface
A small amount of received light passes through the pinhole.
When Focus is Obtained on the Target Surface
Focus is obtained on target surface
All of the received light passes through the pinhole.
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Product catalogs and manuals include both sensor head and controller information.
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