Features

Overview

54 Megapixel 3CCD

Hi-Performance Graphics

High-resolution lens

Digital Focus

Quick 3D Display

Hi-magnification System

Multi-viewer System

Simple Operation

Measurement Functions

Tools :

Online Support and Services

Features
3D Profile Measurement
3D Profile Measurement Using a Microscope
For full details, download the PRODUCT CATALOG using the CATALOG icon in the Online Support and Services box above

Profile Measurement Unit

3D automatic profile measurement unit [Optional]

3D Profile Measurement*

The VHX-600 creates a 3D image based on automatically captured images, and it calculates height profile data on a desired measuring line. Height, width and height difference data on the measuring line are plotted on a graph. Since the profile graph is related to the cursor position in the image display area, you can see the current measuring point easily.
* Function of the VHX-H2MK

With the horizontal/vertical cursor, the height and width can be measured. The 2-line comparative mode can simultaneously display comparative analysis profile data on two parallel lines.

Height Color/Scale Display*

Color bars that indicate height are displayed on a 3D image. The highest position is displayed in red, and the lowest position is displayed in blue, allowing you to see a height difference at a glance. The height data can be superimposed on a raw image. Furthermore, the X-axis, Y-axis and Z-axis scales are calculated automatically and displayed according to the image size and the 3D rotation angle.
* Function of the VHX-H2MK

2-point Height Difference Measurement

The VHX-600 can quickly and automatically measure a height difference between specified windows in the automatic measurement mode. In the manual measurement mode, you can measure a height difference between two points while monitoring the focus conditions.

Auto Focus Function

This function helps everyone to perform highmagnification focus adjustment quickly and accurately. The auto focus function can be applied even to a target with uneven surface conditions, since the focusing area can be specified on the screen.

All-in-one System

Centralized control of stage operation, observation and analysis

All steps from stage operation, zoom observation and 3-D analysis to image-saving and network connection are controlled in the VHX unit. You do not need a device or PC for stage operation or analysis. This system saves space and provides high operating efficiency.