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COLOR 3D Violet Laser Scanning Microscope VK-9700
Online Support and Services
Features

Advanced Measurement Systems

High Resolution 0.00004 Mil(0.001 μm) Measurement for Any Target

For full details, download the PRODUCT CATALOG using the CATALOG icon in the Online Support and Services box above

RPD algorithm [NEW] *RPD=Real Peak Detection

Detects the real peak with a unique algorithm based on the Z-I curve. High resolution and reduction of measurement time has been achieved.
RPD algorithm
RPD method provides accuracy more precise than steps in the Z position. Highly accurate measurement results can be obtained in less time.

0.021 Mil(0.53 μm) standard height difference measurement result (Comparison with conventional measurement)
Comparison with conventional measurement

0.00004 Mil(0.001 μm) linear scale module [Best in the industry]

Traceability compatible
The VK-9700 utilizes an ultra-high accuracy linear scale module to determine extremely reliable height measurements.
The scale is traceable to national standards.
Linear scale module

Ultra-high accuracy linear scale module (Comparison with traditional linear scale module)
Comparison
             10x accuracy when compared with a conventional product

Traceability compatible

Measurement results obtained using the VK Series are highly reliable measurement data that comply with the national standard traceability.
The VK-9700 is a highly capable measurement device.
Traceability diagram

High N.A. Apo (apochromatic) lens

The higher the N. A. (Numerical aperture) of an objective lens, the shallower the focal depth and the more likely to create a small beam spot.
This results in high accuracy measurement and high definition examination.
Additionally, the VK-9700 detects reflecting light from steep surface angles and improves angular tracking characteristics.
The VK-9700 employs the N.A.0.95 Apo lens, the first class in optical lenses.
Apo (apochromatic) lens

14 bit photo multiplier

Employing a photo multiplier as the light receiving element has enabled the best dynamic range in laser scanning microscopes.
The VK-9700 has achieved accurate measurement of targets whose reflectance differential varies a lot or precipitous targets whose reflecting light becomes weak.
14 bit photo multiplier

Horizontal installation design provides high resistance to vibration.

The main body of the VK-9700 consists of the measuring head section that has examination and measurement features, and the stage.
The weight of the measuring head section has been reduced and a horizontal installation design supports the measuring head from the base plane.
This allows the VK-9700 to be installed in any environment and enables high accuracy measurement.
The foot of the VK-9700 employs aseismic gel exclusively for the VK-9700.
high resistance

MD disk bit (12000x)
No aseismic design Aseismic design
No aseismic design Aseismic design (VK-9700)
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