Thickness measurement of transparent web

Thickness measurement of transparent web

High accuracy measuring coating thickness of films

Nanometer resolution can be used to measure thickness without contacting the target

Benefit

High accuracy, can be measured 5um thickness and can be measured multi layered film.

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  • SI-F series - Micro-head Spectral-interference Laser Displacement Meter

    Introducing the world’s first micro-head, with the highest measurement accuracy in its class and a level of performance that was previously thought impossible.

  • SI-F80R series - Spectral-Interference Wafer Thickness Meter

    With the adoption of the near-infrared SLD, thickness measurement for the wafer alone is possible even while BG tape is affixed. Even when there is strong pattern-based variation on the surface of the wafer, accurate in-line measurement is possible.