Nanometer resolution can be used to measure thickness without
contacting the target
High accuracy, can be measured 5um thickness and can be measured
multi layered film.
Introducing the world’s first micro-head, with the highest
measurement accuracy in its class and a level of performance that
was previously thought impossible.
With the adoption of the near-infrared SLD, thickness measurement
for the wafer alone is possible even while BG tape is affixed. Even
when there is strong pattern-based variation on the surface of the
wafer, accurate in-line measurement is possible.
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