Measurement 22D Laser Displacement Sensor

A profile of the surface is obtained where the laser line hits, making it possible to acquire relative measurements such as step height.

KEY POINTS

Even if the target is tilted, step can be measured accurately because the sensor head features an alignment adjustment function.

LJ-V Series
  • 2D Triangulation Method.
  • In-line Multi-point measurement.
  • World's Fastest sampling rate at 64,000 images/sec.
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LJ-V Series
LT Series
  • Confocal Method
  • 2 µm spot diameter
  • Superior thin film measurement capabilities
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LT Series

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