Measurement 2Laser Displacement Sensor

The target or sensor must be moved, warpage and flatness is calculated by the data collected at each measurement location.

KEY POINTS

  • Only one head is used, so costs can be reduced.
  • Chattering when the sensor heads are moved causes measurement errors.
  • A mechanism for moving the sensor head is required.
LK-G Series
  • Triangulation Method.
  • World's fastest sampling rate 392 kHz.
  • 12 sensor heads can be connected.
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LK-G Series
SI Series
  • Spectral Interference Method
  • Ultra-high resolution of 1 nm
  • 2 mm microprocess sensor head
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SI Series

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