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          3D Laser Scanning Confocal MicroscopeVK-X series

          VK-X200K

          Shape Measurement Laser Microscope

          [Discontinued model]

          This model has been discontinued.

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          SPECIFICATIONS

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          Model

          VK-X200K

          Type

          Controller

          Objective lens magnification

          Magnification on a 15” monitor 100x

          Magnification on a 15” monitor 200x

          Magnification on a 15” monitor 400x

          Magnification on a 15” monitor 1000x

          Magnification on a 15” monitor 2000x

          Magnification on a 15” monitor 3000x

          Observation/
          measuring range

          Horizontal (H): μm Mil

          Magnification on a 15” monitor 100x

          Magnification on a 15” monitor 200x

          Magnification on a 15” monitor 400x

          Magnification on a 15” monitor 1000x

          Magnification on a 15” monitor 2000x

          Magnification on a 15” monitor 3000x

          Vertical (V): μm Mil

          Magnification on a 15” monitor 100x

          Magnification on a 15” monitor 200x

          Magnification on a 15” monitor 400x

          Magnification on a 15” monitor 1000x

          Magnification on a 15” monitor 2000x

          Magnification on a 15” monitor 3000x

          Working distance: mm inch

          Magnification on a 15” monitor 100x

          Magnification on a 15” monitor 200x

          Magnification on a 15” monitor 400x

          Magnification on a 15” monitor 1000x

          Magnification on a 15” monitor 2000x

          Magnification on a 15” monitor 3000x

          Numerical Aperture (N.A.)

          Magnification on a 15” monitor 100x

          Magnification on a 15” monitor 200x

          Magnification on a 15” monitor 400x

          Magnification on a 15” monitor 1000x

          Magnification on a 15” monitor 2000x

          Magnification on a 15” monitor 3000x

          Optical zoom

          1x to 8x

          Total magnification

          200x to 24000x

          Optical system for observation/measurement

          Pinhole confocal optical system

          Height measurement

          Measuring range

          7 mm 0.28"

          Display resolution

          0.0005 µm

          Repeatability σ

          0.012 µm *1

          Width measurement

          Display resolution

          0.001 µm

          Repeatability 3σ

          0.02 µm *2

          Frame memory

          Pixel count

          2048 x 1536, 1024 x 768, 1024 x 64

          For monochrome image

          16 bit

          For color image

          8-bit for RGB each

          For height measurement

          24-bit

          Frame rate

          Surface scan

          4 Hz to 120 Hz

          Line scan

          7900 Hz

          Auto function

          AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings

          Measurement laser light source

          Wavelength

          Violet laser, 408 nm

          Maximum output

          0.95 mW

          Laser Class

          Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3)

          Laser light-receiving element

          PMT (Photoelectron Multiplier Tube)

          Light source for
          optical observation

          Lamp

          100 W halogen lamp

          Color camera for
          optical observation

          Imaging element

          1/3" Color CCD image sensor

          Recording resolution

          Super high resolution (3072×2304)

          Auto adjustment

          Gain, Shutter speed

          Data processing unit

          Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4

          Rating

          Power voltage

          100 to 240 VAC ±10 %, 50/60 Hz

          Power consumption

          450 VA max.

          Weight

          Approx. 11 kg

          *1 When a standard height difference of 2 µm is measured with the 50x objective lens.
          *2 When the KEYENCE reference chart line width of 1 µm is measured with the 150x objective lens in line peak mode (image averaging: 8 times).
          *3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50.
          *4 Windows 7 is a registered trademark of Microsoft, U.S.A.

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