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          3D Laser Scanning Confocal MicroscopeVK-X series

          VK-X210

          Shape Measurement Laser Microscope

          [Discontinued model]

          This model has been discontinued.

          Recommended Replaceable Products
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          SPECIFICATIONS

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          Model

          VK-X210

          Type

          Measurement unit

          Objective lens magnification

          Magnification on a 15” monitor 200x

          10×

          Magnification on a 15” monitor 400x

          20×

          Magnification on a 15” monitor 1000x

          50×

          Magnification on a 15” monitor 3000x

          150×

          Observation/
          measuring range

          Horizontal (H): μm Mil

          Magnification on a 15” monitor 200x

          1350
          53.15

          Magnification on a 15” monitor 400x

          675
          26.57

          Magnification on a 15” monitor 1000x

          270
          10.63

          Magnification on a 15” monitor 3000x

          90
          3.54

          Vertical (V): μm Mil

          Magnification on a 15” monitor 200x

          1012
          39.84

          Magnification on a 15” monitor 400x

          506
          19.92

          Magnification on a 15” monitor 1000x

          202
          7.95

          Magnification on a 15” monitor 3000x

          67
          2.64

          Working distance: mm inch

          Magnification on a 15” monitor 200x

          16.5
          0.65"

          Magnification on a 15” monitor 400x

          3.1
          0.12"

          Magnification on a 15” monitor 1000x

          0.35
          0.01"

          Magnification on a 15” monitor 3000x

          0.2
          0.008"

          Numerical Aperture (N.A.)

          Magnification on a 15” monitor 200x

          0.3

          Magnification on a 15” monitor 400x

          0.46

          Magnification on a 15” monitor 1000x

          0.95

          Magnification on a 15” monitor 3000x

          Optical zoom

          1x to 8x

          Total magnification

          200x to 24000x

          Optical system for observation/measurement

          Pinhole confocal optical system

          Height measurement

          Measuring range

          7 mm 0.28"

          Display resolution

          0.0005 µm

          Repeatability σ

          0.012 µm *1

          Width measurement

          Display resolution

          0.001 µm

          Repeatability 3σ

          0.02 µm *2

          Frame memory

          Pixel count

          2048 x 1536, 1024 x 768, 1024 x 64

          For monochrome image

          16 bit

          For color image

          8-bit for RGB each

          For height measurement

          24-bit

          Frame rate

          Surface scan

          4 Hz to 120 Hz

          Line scan

          7900 Hz

          Auto function

          AAG (Auto gain), Auto focus, Auto upper/lower limit setting, Double Scan brightness settings

          Measurement laser light source

          Wavelength

          Violet laser, 408 nm

          Maximum output

          0.95 mW

          Laser Class

          Class 2 Laser Product (IEC 60825-1, FDA (CDRH) Part1040.10 *3)

          Laser light-receiving element

          PMT (Photoelectron Multiplier Tube)

          Light source for
          optical observation

          Lamp

          100 W halogen lamp

          Color camera for
          optical observation

          Imaging element

          1/3" Color CCD image sensor

          Recording resolution

          Super high resolution (3072×2304)

          Auto adjustment

          Gain, Shutter speed

          Data processing unit

          Dedicated PC, supplied by KEYENCE with the VK-X (OS: Windows 7 Professional Edition) *4

          Software

          Auto-focus software

          This is software that automatically focuses the image during observation.

          Pixel shift software

          This is software that increases the number of pixels recorded by shifting pixels during image recording.

          HDR function software

          This is software that obtains 16-bit data to optimize the image appearance.

          RPD function software

          This is an algorithm that detects the measurement result quickly and accurately.

          AAG function software

          This is software that automatically adjusts the laser light-receiving sensitivity within the setting range.

          Auto upper/lower limit setting software

          This is software that automatically recognizes the upper and lower limits of the target and sets the measurement range.

          Beginner mode function software

          This is software that can be used to easily perform measurements as flow charts.

          Comment function software

          This is software that displays comments on the observation screen.

          Measurement and scale display software

          This is software that displays a scale on the dimension measurement and observation screen.

          Rating

          Power voltage

          100 to 240 VAC ±10 %, 50/60 Hz

          Power consumption

          450 VA max.

          Weight

          Approx. 26 kg
          (Measuring head detached: Approx. 10 kg)

          *1 When a standard height difference of 2 µm is measured with the 50x objective lens.
          *2 When the KEYENCE reference chart line width of 1 µm is measured with the 150x objective lens in line peak mode (image averaging: 8 times).
          *3 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No.50.
          *4 Windows 7 is a registered trademark of Microsoft, U.S.A.

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