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          3D Laser Scanning Confocal MicroscopeVK-X series

          VK-X250K

          Controller

          [Discontinued model]

          This model has been discontinued.

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          SPECIFICATIONS

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          Model

          VK-X250K

          Total magnification

          Up to 28000×*1

          Field of view (minimum range)

          11 µm to 5400 µm

          Frame rate

          Laser measurement speed

          4 to 120 Hz, 7900 Hz*2

          Measurement principles

          Optical system

          Pinhole confocal optical system

          Light receiving element

          16-bit photomultiplier

          Scanning method (during general measurement and image stitching)

          Automatic upper/lower limit setting, high-speed light intensity optimization (AAGII),
          poor reflected light intensity supplement (Double Scan)

          Height measurement

          Display resolution

          0.5 nm

          Linear scale

          Dynamic range

          16 bits

          Repeatability σ

          20× 40 nm , 50× 12 nm ,
          150× 12 nm *3

          Memory for Z-axis measurement

          14 million steps

          Accuracy

          0.2+L/100 µm or less (L=Measuring Length)*3

          Z stage configuration

          Structure

          Base with separate measuring head

          Maximum sample height

          28 mm 1.102", 128 mm 5.039" (option)

          Width measurement

          Display resolution

          1 nm

          Repeatability 3σ

          20× 100 nm, 50× 40 nm ,
          150× 20 nm *3

          Accuracy

          ±2%*4

          XY stage configuration

          Manual: Operating range

          70 mm×70 mm 2.76" × 2.76"

          Motorized: Operating range

          50 mm × 50 mm 1.97" × 1.97" 100 mm × 100 mm 3.94" × 3.94"*5

          Observation

          Observation image

          Super-high-resolution color CCD image
          16-bit laser color confocal image
          Confocal + ND filter optical system
          C-laser differential interference image

          Maximum capture resolution

          3072×2304

          Measurement laser light source

          Wavelength

          Violet laser, 408 nm

          Maximum output

          0.95 mW

          Laser Class

          Class 2 laser product (IEC60825-1)

          Weight

          Microscope unit

          Approx. 26 kg (sensor head detached: approx. 10 kg)

          Controller

          Approx. 11 kg

          *1 For 23-inch monitors.
          *2 At top speed when using a combination of measurement mode/measurement quality/lens magnification. When the line scan has a measurement pitch that is within 0.1 µm.
          *3 When measuring a standard sample (standard scale) with a 20× or greater lens at an ambient temperature of 20 ± 2°C 68 ± 3.6°F. However, does not apply to the VK-X120/130 with a 100× lens.
          *4 When measuring a standard sample (standard scale) with a 20× or greater lens at an ambient temperature of 20 ± 2°C 68 ± 3.6°F. However, does not apply to the VK-X120/130 with a 100× lens.
          *5 When a motorized stage is mounted.

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