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          3D Laser Scanning Confocal Microscope

          VK-X series

          System Configuration

          System Configuration

          VK Laser Scanning Microscope Options

          VK Laser Scanning Microscope Options

          Adjustable-height Stand for the VK Series

          A highly-rigid, adjustable-height stand attaches to the back of the VK microscope, allowing the measuring head to be adjusted to any height. Inserting a spacer between the measuring head and the base improves the stability and enables high accuracy measurement.

          Objective Lenses

          Objective Lenses

          A large selection of lenses are available, including high N.A., APO, long focal distance, and low magnification lenses.

          300 mm (11.81") Wafer Stage

          300 mm (11.81") Wafer Stage

          An entire 300 mm (11.81") wafer can be examined and analyzed. Easy-to-mount design.

          Motorized Stage

          Motorized Stage

          The motorized stage is essential to automatic image assembly and programmable operation. Easy-to-mount design.

          Separate Measuring Head

          Separate Measuring Head

          Non-destructive examination and analysis of any point on largesized targets by mounting the head on a 3rd-party stage.

          ISO 25178
          Surface texture measurement module VK-H1XR

          Surface texture measurement module VK-H1XR

          This software module complies with ISO 25178 and allows users to complete measurements of several surface parameters. Parameters that can be measured include height, spatial, hybrid, functional, and functional volume measurements.

          2D & 3D Measurement Tools
          Analysis Expansion Module VK-H1XP [Optional]

          Indentation/Projection Measurement

          Divide areas above (projections) or below (indentations) a specified height threshold value into separate zones, and take measurements for each area.

          Indentation Measurement

          Indentation Measurement

          Surface of metal component after processing (3000x)

          Projection Measurement

          Projection Measurement

          Bump (2000x)

          Position Compensation Function [Industry’s First]

          When a standard sample has been registered and a different image is opened in a template, the VK-Analyzer automatically adjusts the image position so that the image opens at the same position as the registered sample. This function is effective when measuring large sample populations.

          Automatic Position Compensation

          Automatic Position Compensation

          Wire bonding (1000x)

          Height Difference Analysis Function

          Height Difference Analysis Function

          Analyzes the difference between two images as a solid 3D image. Enables surface-based image analysis that can capture minute changes.

          Sphere/Surface Angle Measurement

          Automatically extracts the radii of circular objects in a specified area. Since the measurements are calculated automatically, this function reduces variations in measurements between users.

          Sphere Measurement

          Sphere Measurement

          Microlens (1000x)

          Particle Analysis Module VK-H1XG [Optional]

          Particle Analysis Module VK-H1XG [Optional]

          Automatically counts and measures circular objects within the microscope field. Preprocessing such as automatic separation of adjacent particles, counting, diameter, etc can be performed.

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