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          Wide-Area 3D Measurement SystemVR series

          VR-3000K

          Wide-Area 3D Measurement System Controller

          SPECIFICATIONS

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          Model

          VR-3000K

          Type

          Controller

          Head

          VR-3100,VR-3050

          Field-of-view

          Wide-field mode

          Magnification on a
          15" monitor 12x

          Horizontal

          24.0 mm 0.94"

          Vertical

          18.0 mm 0.71"

          Magnification on a
          15" monitor 25x

          Horizontal

          12.0 mm 0.47"

          Vertical

          9.0 mm 0.35"

          Magnification on a
          15" monitor 38x

          Horizontal

          8.0 mm 0.31"

          Vertical

          6.0 mm 0.24"

          Magnification on a
          15" monitor 50x

          Horizontal

          Vertical

          4.5 mm 0.18"

          High magnification mode

          Magnification on a
          15" monitor 40x

          Horizontal

          7.6 mm 0.30"

          Vertical

          5.7 mm 0.22"

          Magnification on a
          15" monitor 80x

          Horizontal

          3.8 mm 0.15"

          Vertical

          2.9 mm 0.11"

          Magnification on a
          15" monitor 120x

          Horizontal

          2.5 mm 0.10"

          Vertical

          1.9 mm 0.07"

          Magnification on a
          15" monitor 160x

          Horizontal

          Vertical

          1.4 mm 0.06"

          Zoom

          1 to 4x

          Measurable height

          Wide-field mode:10 mm 0.39" (±5 mm ±0.20") High magnification mode:1 mm 0.04" (±0.5 mm ±0.02")*1

          Display resolution

          0.1 µm(VR-3200,3100), 0.5 µm(VR-3050)*2

          Repeatability (σ)

          Height measurement

          0.5 µm*3

          Width measurement

          Wide-field mode: 1 µm, High magnification mode: 0.5 µm*3

          Measurement
          accuracy

          Height measurement

          ±3 µm*3

          Width measurement

          Wide-field mode: ±5 µm, High magnification mode: ±2 µm*3

          Stitching function

          Full automatic (XY stage automatic control + auto focus) measurement*4
          Auto adjustment, Auto template analysis*4
          Manual (XY, Z)*4

          Stage

          XY stroke

          184 × 88 mm 7.24" x 3.46" (motorized)
          70 mm 2.76" *5 (200 mm *6) (manual)

          Z stroke

          90 mm 3.54"(electric)

          Rotation

          ±90°

          Tilt

          Over ±30°

          Working distance

          75 mm 2.95"

          Image receiving element

          4 megapixel monochrome CMOS

          Transmitter lens

          Double telecentric lens x2

          Receiver lens

          Double telecentric lens

          Light sources

          Observation light source

          LED ring light (red, green, blue)(VR-3100),LED ring light (white)(VR-3050)

          Measurement light source

          White LED

          Image size

          1024 x 768 pix, 2048 x 1536 pix

          Data processing

          Dedicated PC specified by KEYENCE (OS: Windows 7)*7

          Rating

          Power voltage

          100 to 240 VAC ±10 %, 50/60 Hz

          Power consumption

          150 VA

          Environmental resistance

          Relative humidity

          35 to 80 % RH (No condensation)

          Weight

          3.8 kg

          *1 Low range ±5 mm 0.20" and high range ±0.5 mm ±0.02" around the focal point position.
          *2 Height measurement resolution.
          *3 Value obtained using KEYENCE's specified standard gauge with measurement in KEYENCE's specified measurement mode (ambient temperature: 23±1°C 73.4±1.8°F).
          *4 The stitching module (VR-H2J) is required.
          *5 The VR-3050 requires the XYθ stage (OP-87715).
          *6 When the OP-87717 manual slider for stitching used.
          *7 Windows 7 Professional and Ultimate.

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