Image Dimension Measuring SystemIM-7000 series

IM-7001

Controller

SPECIFICATIONS

Select Language

Model

IM-7001

Type

Controller

Image sensor

1” 6.6 mega pixel monochrome CMOS

Display

10. 4” LCD monitor (XGA: 1024 × 768)

Receiver lens

Double telecentric lens

Image
measurement

Field of view

Wide-field measurement mode : 200 mm x 200 mm 7.87 × 7.87" (4x R50)
High-precision measurement mode : 125 × 125 mm 4.92 × 4.92"

Minimum display unit

0.1 µm

Repetition accuracy

W/o stage movement

Wide-field measurement mode : ±1 µm
High-precision measurement mode : ±0.5 µm

With stage movement

Wide-field measurement mode : ±2 µm
High-precision measurement mode : ±1.5 µm

Measurement accuracy (±2σ)

W/o binding

Wide-field measurement mode :±5 µm *1
High-precision measurement mode :±2 µm*2

With binding

Wide-field measurement mode :±(7+0.02 L) µm*3
High-precision measurement mode :±(4+0.02L) µm*4

Light probe
Measurement

Measurable area (XY)

90 × 90 mm 3.54 × 3.54"

Maximum measurement depth

30 mm 1.18"

Light probe diameter

ø3 mm ø0.12"

Measuring force

0.015 N

Repeatability

±2 µm*5

Measurement accuracy

±(8+0.02 L)µm*6

External remote input

Non-voltage input (with and without contact)

External output

OK/NG/FAIL/MEAS

PhotoMos output
Rated load 24 VDC 0.5 A
ON resistance 50 mΩ or lower

Interface

LAN

RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

USB 2.0 series A

6 ports (front: 2, rear: 4)

Record

Hard disk drive

500 GB

Illumination system

Transparent

Telecentric transparent illumination

Ring

Four division ring illumination(IM-7010)
Four division, multi-angle illumination(electric), Slit ring (directivity) illumination (electric) (IM-7020)

XY stage

Moving range

100 × 100 mm 3.94 × 3.94" (electric)

Withstand load

5kg

Z stage

Moving range

75 mm 2.95" (electric)

Power supply

Power voltage

100 to 240 VAC 50/60 Hz

Power consumption

430 VA or lower

Environmental resistance

Pollution degree

2

Overvoltage category

II

Ambient temperature

+10 to +35 °C 50 to 95 °F

Relative humidity

20 to 80 % RH (No condensation)

Weight

Approx. 8 kg

*1 In the range of ø80 mm ø3.15" , within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
*2 In the range of ø20 mm ø0.79" within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
*3 In the range of 180 × 180 mm 7.09 × 7.09" (square R40), within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units)
*4 In the range of 120 × 120 mm 4.72 × 4.72", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units)
*5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm
*6 When the detection system is standard, and the ambient temperature is 23°C ±1°C 73.4°F ±1.8°F , with a stage load weighing 2 kg or less. If the detection system is at a deep position, then ± (10 + 0.02 L) µm with L as the measurement length in mm.

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