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          Image Dimension Measurement SystemIM-7000 series

          IM-7020

          Measurement Head

          SPECIFICATIONS

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          Model

          IM-7020

          Type

          Head
          Model incorporating backlighting/programmablering-illumination unit/light probe unit

          Image sensor

          1” 6.6 mega pixel monochrome CMOS

          Display

          10. 4” LCD monitor (XGA: 1024 × 768)

          Receiver lens

          Double telecentric lens

          Image
          measurement

          Field of view

          Wide-field measurement mode: 200 mm × 200 mm 7.87 × 7.87" (4x R50)
          High-precision measurement mode: 125 × 125 mm 4.92 × 4.92"

          Minimum display unit

          0.1 µm

          Repetition accuracy

          W/o stage movement

          Wide-field measurement mode: ±1 µm
          High-precision measurement mode: ±0.5 µm

          With stage movement

          Wide-field measurement mode: ±2 µm
          High-precision measurement mode: ±1.5 µm

          Measurement accuracy (±2σ)

          W/o binding

          Wide-field measurement mode: ±5 µm *1
          High-precision measurement mode: ±2 µm*2

          With binding

          Wide-field measurement mode: ± (7+0.02 L) µm*3
          High-precision measurement mode: ± (4+0.02L) µm*4

          Light probe
          Measurement

          Measurable area (XY)

          90 × 90 mm 3.54 × 3.54"

          Maximum measurement depth

          30 mm 1.18"

          Light probe diameter

          ø3 mm ø0.12"

          Measuring force

          0.015 N

          Repeatability

          ±2 µm*5

          Measurement accuracy

          ± (8+0.02 L) µm*6

          External remote input

          Non-voltage input (with and without contact)

          External output

          OK/NG/FAIL/MEAS

          PhotoMos output
          Rated load 24 VDC 0.5 A
          ON resistance 50 mΩ or lower

          Interface

          LAN

          RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)

          USB 2.0 series A

          6 ports (front: 2, rear: 4)

          Record

          Hard disk drive

          500GB

          Illumination system

          Transparent

          Telecentric transparent illumination

          Ring

          Four division, multi-angle illumination (electric)
          Slit ring (directivity) illumination (electric)

          XY stage

          Moving range

          100 × 100 mm 3.94 × 3.94" (electric)

          Withstand load

          5 kg

          Z stage

          Moving range

          75 mm 2.95" (electric)

          Power supply

          Power voltage

          100 to 240 VAC 50/60 Hz

          Power consumption

          430 VA or lower

          Environmental resistance

          Pollution degree

          2

          Overvoltage category

          II

          Ambient temperature

          +10 to +35 °C 50 to 95 °F

          Relative humidity

          20 to 80 % RH (No condensation)

          Weight

          Approx. 31 kg

          *1 In the range of ø80 mm ø3.15", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
          *2 In the range of ø20 mm ø0.79" within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position
          *3 In the range of 180 × 180 mm 7.09 × 7.09" (square R40), within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units)
          *4 In the range of 120 × 120 mm 4.72 × 4.72", within the operating ambient temperature range of +23°C ±1°C +73.4°F ±1.8°F at the focused focal point position, and with a load weighing 2 kg or less on the stage (L = amount of stage movement in mm units)
          *5 When the detection system is standard. If the detection system is at a deep position, then ±3 µm
          *6 When the detection system is standard, and the ambient temperature is 23°C ±1°C 73.4°F ±1.8°F , with a stage load weighing 2 kg or less. If the detection system is at a deep position, then ± (10 + 0.02 L) µm with L as the measurement length in mm.

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