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          3D Interference Measurement SensorWI-5000 series

          WI-004

          Sensor head Standard type

          SPECIFICATIONS

          Select Language

          Model

          WI-004*1*2*3

          Reference distance

          18 mm 0.71"

          Measurement range

          Z

          1.4 mm 0.06" (Standard Mode), 0.7 mm 0.03" (High Speed Mode)

          XY

          4 × 4 mm 0.16" × 0.16"

          Minimum detection area

          15 × 15 µm 0.000591" × 0.000591"

          Repeatability (height difference)

          0.1 µm 0.000004"*4

          Linearity (height difference)

          ±2.8 µm 0.000110"(±0.2% of F.S., F.S. = 1.4 mm 0.06", +20 to +30°C +68 to +86°F)*5

          Light source for measurement

          Type

          Infrared SLD

          Center wavelength

          830 nm

          Laser class (IEC60825-1)

          Class 3R

          Output

          3.6 mW

          Guide light source

          Type

          Red semiconductor laser

          Wavelength

          660 nm

          Laser class (IEC60825-1)

          Class 1

          Output

          0.15 mW

          Sampling frequency

          Internal Trigger

          133 ms (High Speed Mode), 266 ms (Standard Mode)

          External Trigger

          266 ms max. (High Speed Mode), 532 ms max. (Standard Mode)*6

          Environmental resistance

          Ambient light

          Incandescent lamp/fluorescent lamp: 5,000 lux max.

          Ambient temperature

          0 to +35 °C 32 to 95 °F

          Relative humidity

          20 to 85 % RH (No condensation)

          Weight

          Approx. 3,000 g

          *1 The laser classification for FDA(CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.The resolution of the height (distance from head reference plane to measurement workpiece) is 1 µm(*2).
          *2 This is ±3 σ value (Auto Maintenance Mode is OFF) when the average height of a single rectangular area(*3) has been measured for 30 seconds using a KEYENCE standard target.
          *3 The rectangular size is WI-001 : 0.3 mm × 0.9 mm 0.01" × 0.04", WI-004 : 1.1 mm × 3.7 mm 0.04" × 0.15", WI-010 : 3 mm × 9 mm 0.12" × 0.35".
          *4 This is σ value (Auto Maintenance Mode is OFF, Capture Timing is “Prioritize Accuracy”) when the average height difference of two rectangular areas(*3) has been measured for 30 seconds using a KEYENCE standard target.
          *5 This is the value (Auto Maintenance Mode is OFF, Capture Timing is “Prioritize Accuracy”) when the average height difference of two rectangular areas(*3) has been measured using a KEYENCE standard target.
          *6 The workpiece stopping time at capturing is 120 ms (High Speed Mode) or 240 ms (Standard Mode).

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