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          3D Interference Measurement SensorWI-5000 series

          WI-S1

          Dedicated stand

          SPECIFICATIONS

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          Model

          WI-S1

          XY stage moving range

          X axis: 75 mm 2.95", Y axis: 50 mm 1.97"

          XY stage tilt angle

          ±2°

          Z stage moving range

          Coarse movement: 64 mm 2.52", fine movement: 2.0 mm 0.08"

          Dimensions(excluding moving parts)

          231 (W) x 408 (H) x 360 (D) mm 9.09" (W) x 16.06" (H) x 14.17" (D)

          Weight

          Approx. 10 kg

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          Measurement Sensors