Confocal Displacement Sensor

CL-3000 series

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Optical Units and Sensor Heads - Quad type

Model

CL-L007N*1

CL-L015N*1

CL-L030N*1

CL-L070N*1

Type

Optical unit

Head

CL-L007*1

CL-L015 *1

CL-L030*1

CL-L070 *1

Reference distance

7 mm 0.28"

15 mm 0.59"

30 mm 1.18"

70 mm 2.76"

Reference measurement range

Measurement range

± 1.5 mm ± 0.06"

± 1.3 mm ± 0.05"

± 3.7 mm ± 0.15"

± 10 mm ± 0.39"

Linearity

± 2.1 µm ± 0.000083"*2

± 0.49 µm ± 0.000019"*2

± 0.94 µm ± 0.000037"*2

± 2.2 µm ± 0.000087"*2

High precision measurement range

Measurement range

± 0.5 mm ± 0.02"

± 1.0 mm ± 0.04"

± 3.0 mm ± 0.12"

Linearity

± 0.91 µm ± 0.000036"*2

± 0.41 µm ± 0.000016"*2

± 0.72 µm ± 0.000028"*2

± 2.0 µm ± 0.000079"*2

Resolution

0.25 µm 0.000010"*3

Spot diameter

ø 750 µm ø 0.0295"

ø 300 µm ø 0.0118"

ø 500 µm ø 0.0197"

ø 600 µm ø 0.0236"

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Ambient temperature for usage

0 to 50°C 32 to 122°F

Ambient humidity for usage

20% RH to 85% RH (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm 0.06"; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm 0.01"; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Temperature characteristic

Head

0.005% of F.S. / °C

Optical unit

0.015% of F.S. / °C

Material

Head

SUS

Front: SUS Rear: Aluminum

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g

Approx. 180 g

Approx. 200 g

Approx. 280 g

Optical unit

Approx. 1600 g

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface).

Optical Units and Sensor Heads - Focused spot type

Model

CL-P007N*1

CL-P015N*1

CL-P030N*1

CL-P070N*1

CL-PT010N*1

Type

Optical unit

Head

CL-P007 *1

CL-P015*1

CL-P030*1

CL-P070 *1

CL-PT010*1

Reference distance

7 mm 0.28"

15 mm 0.59"

30 mm 1.18"

70 mm 2.76"

10 mm 0.39"

Reference measurement range

Measurement range

± 1.5 mm ± 0.06"

± 1.3 mm ± 0.05"

± 3.7 mm ± 0.15"

± 10 mm ± 0.39"

± 0.3 mm ± 0.01"

Linearity

± 0.96 µm ± 0.000038"*2

± 0.49 µm ± 0.000019"*2

± 0.94 µm ± 0.000037"*2

± 2.2 µm ± 0.000087"*2

± 0.22 µm ± 0.000009"*2

High precision measurement range

Measurement range

± 0.5 mm ± 0.02"

± 1.0 mm ± 0.04"

± 3.0 mm ± 0.12"

± 0.15 mm ± 0.01"

Linearity

± 0.55 µm ± 0.000022"*2

± 0.41 µm ± 0.000016"*2

± 0.72 µm ± 0.000028"*2

± 2.0 µm ± 0.000079"*2

± 0.2 µm ± 0.000008"*2

Resolution

0.25 µm 0.000010"*3

Spot diameter

ø 50 µm ø 0.0020"

ø 25 µm ø 0.0010"

ø 38 µm ø 0.0015"

ø 50 µm ø 0.0020"

ø 3.5 µm ø 0.000138"

Laser class

Optical unit

Class 1

Sampling cycle

100/200/500/1000 µs (Adjustable 4-stage)

Environmental resistance

Enclosure rating

Head

IP67 (IEC60529)

IP64 (IEC60529)

Ambient light

Target surface illuminance 30,000 lux (Incandescent lamp)

Ambient temperature for usage

0 to 50°C 32 to 122°F

Ambient humidity for usage

20% RH to 85% RH (no condensation)

Vibration resistance

Head

10 to 57 Hz, double amplitude 1.5 mm 0.06"; 2 hours each for X, Y, and Z axes

10 to 57 Hz, double amplitude 0.45 mm 0.02"; 2 hours each for X, Y, and Z axes

Optical unit

10 to 57 Hz, double amplitude 0.3 mm 0.01"; 2 hours each for X, Y, and Z axes

Shock resistance

15G 6 ms

Temperature characteristic

Head

0.005% of F.S. / °C

0.1% of F.S. / °C

Optical unit

0.015% of F.S. / °C

Material

Head

SUS

Front: SUS Rear: Aluminum

Optical unit

Polycarbonate

Weight

Head

Approx. 140 g

Approx. 180 g

Approx. 200 g

Approx. 280 g

Approx. 1100 g

Optical unit

Approx. 1600 g

*1 Sensor head and optical unit are a matched pair. Not cross compatible.
*2 Value measured in displacement mode with KEYENCE reference workpiece (mirrored surface).
*3 Value measured using 16,384 average cycles with KEYENCE reference workpiece (mirrored surface). (Value measured with 4096 average cycles on CL-PT010 only.)

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