Surface Scanning Laser Confocal Displacement Meter

LT-9000 series

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Sensor Head, Not Subject to Export Control, with Camera Function LT-9031M

LT-9031M - Sensor Head, Not Subject to Export Control, with Camera Function






Measurement range

±1.0 mm ±0.04"

Reference distance

30 mm 1.18"

Light source


Red semiconductor laser


655 nm


170 µW (IEC 60825-1) /3.0 µW (FDA (CDRH) Part 1040.10)

Laser Class

Class IIa Laser Product (FDA (CDRH) Part 1040.10)
Class 1 Laser Product (IEC 60825-1)

Spot diameter

Approx. ø7 µm ø0.000276"

Scan width/interval

0 to 560 µm 0 to 0.022" (6 steps)/
1 to 8 µm 0.000039 to 0.000315" (4 steps)


0.3 µm 0.000012"*1


±0.3% of F.S.*1

Sampling cycle

640 µs to 187 ms (14 steps)*2


Minimumdisplayable unit

0.1 µm *3

Display range

±9999.99 µm



Display cycle

10 times/sec.*4

Terminal block

Analog output

±10 V x 2 outputs, output impedance: 100 Ω

Timing input

Non-voltage input

Reset input

Auto-zero input

Monitor dedicated power supply

24 VDC*5

Control I/O

Judgment mode

3-step limits output

For OUT1 and OUT2, and NPN open collector output*6

Binary mode

Binary output

Measured data output (21 bits), OUT1/OUT2/PROFILE selectable
NPN open collector output*6

Strobe output

NPN open collector output*6

Binary selector output

Binary selection input

Non-voltage input*6

Stability output

NPN open collector output

Laser remote input

Non-voltage input

Program switching input

Non-voltage input x 3 inputs

RS-232C interface

Measured data output and control I/O (Selectable up to baud rate 115200 bps.)

Video output

NTSC compliant (PIN connector)


Function presence/absence


Microscope function

Field of view

2.5 mm x 2.0 mm 0.10" x 0.08"



Illumination light source

Infrared LED
(wavelength: 870 nm)

Main functions

Displacement mode

Distance measurement, Transparent object thickness
measurement, Surface selection, Dark-out, Mask, Trend graph
display, and Scan width/interval change*7

Profile mode



Light intensity accumulation, Microscope (LT-9501H, LT-9501HSO (5654) only), Tolerance
judgment, 8-program registration, Calibration, Averaging, Hold modes, Auto-zero, and
interface language selection

Temperature characteristics (20 to 30°C (68 to 86°F))

±0.25% of F.S.


Power voltage

100 to 240 VAC ±10 %, 50/60 Hz

Power consumption

110VA or less

Environmental resistance

Pollution degree


Overvoltage category


Ambient light

Incandescent lamp/Fluorescent lamp: 10,000 lux max.

Ambient temperature

0 to +35 °C 32 to 95 °F

Relative humidity

35 to 85 % RH (No condensation)


Approx. 500 g

*1 The value when the measurement target is a mirrored surface object measured in displacement mode, scan width/interval 120 µm 0.004725"/2 µm 0.000079", and 8-times average
*2 Sampling cycle differs according to the manufacturing variation of individual measuring units. The value when the FINE mode is set to OFF.
*3 Display changes every ±0.3 µm.
*4 Varies depending on the setting
*5 Dedicated power supply for the monitor specified by KEYENCE.
*6 Select either the Limits mode or the Binary mode.
*7 Select either the Distance mode or the Profile mode. (Distance mode is only available with the LT-9501HSO (5654)
and LT-9001HSO (5655).)
The rating of the NPN open-collector output is 30 mA (30 V or lower) maximum, and residual voltage is 0.5 V.
The rating of the Non-voltage input is ON voltage 1 V or lower, and OFF current 0.6 mA or lower.

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