Surface Scanning Laser Confocal Displacement Meter

LT-9000 series

This model has been discontinued.
Compliance with the certification standard is ensured as of the time of shipment from our company.

Sensor Head, Not Subject to Export Control, with Camera Function LT-9031M

LT-9031M - Sensor Head, Not Subject to Export Control, with Camera Function






Measurement range

±1.0 mm ±0.04"

Reference distance

30 mm 1.18"

Light source


Red semiconductor laser


655 nm


170 µW (IEC 60825-1) /3.0 µW (FDA (CDRH) Part 1040.10)

Laser Class

Class IIa Laser Product (FDA (CDRH) Part 1040.10)
Class 1 Laser Product (IEC 60825-1)

Spot diameter

Approx. ø7 µm ø0.000276"

Scan width/interval

0 to 560 µm 0 to 0.022" (6 steps)/
1 to 8 µm 0.000039 to 0.000315" (4 steps)


0.3 µm 0.000012"*1


±0.3% of F.S.*1

Sampling cycle

640 µs to 187 ms (14 steps)*2


Minimumdisplayable unit

0.1 µm *3

Display range

±9999.99 µm



Display cycle

10 times/sec.*4

Terminal block

Analog output

±10 V x 2 outputs, output impedance: 100 Ω

Timing input

Non-voltage input

Reset input

Auto-zero input

Monitor dedicated power supply

24 VDC*5

Control I/O

Judgment mode

3-step limits output

For OUT1 and OUT2, and NPN open collector output*6

Binary mode

Binary output

Measured data output (21 bits), OUT1/OUT2/PROFILE selectable
NPN open collector output*6

Strobe output

NPN open collector output*6

Binary selector output

Binary selection input

Non-voltage input*6

Stability output

NPN open collector output

Laser remote input

Non-voltage input

Program switching input

Non-voltage input x 3 inputs

RS-232C interface

Measured data output and control I/O (Selectable up to baud rate 115200 bps.)

Video output

NTSC compliant (PIN connector)


Function presence/absence


Microscope function

Field of view

2.5 mm x 2.0 mm 0.10" x 0.08"



Illumination light source

Infrared LED
(wavelength: 870 nm)

Main functions

Displacement mode

Distance measurement, Transparent object thickness
measurement, Surface selection, Dark-out, Mask, Trend graph
display, and Scan width/interval change*7

Profile mode



Light intensity accumulation, Microscope (LT-9501H, LT-9501HSO (5654) only), Tolerance
judgment, 8-program registration, Calibration, Averaging, Hold modes, Auto-zero, and
interface language selection

Temperature characteristics (20 to 30°C (68 to 86°F))

±0.25% of F.S.


Power voltage

100 to 240 VAC ±10 %, 50/60 Hz

Power consumption

110VA or less

Environmental resistance

Pollution degree


Overvoltage category


Ambient light

Incandescent lamp/Fluorescent lamp: 10,000 lux max.

Ambient temperature

0 to +35 °C 32 to 95 °F

Relative humidity

35 to 85 % RH (No condensation)


Approx. 500 g

*1 The value when the measurement target is a mirrored surface object measured in displacement mode, scan width/interval 120 µm 0.004725"/2 µm 0.000079", and 8-times average
*2 Sampling cycle differs according to the manufacturing variation of individual measuring units. The value when the FINE mode is set to OFF.
*3 Display changes every ±0.3 µm.
*4 Varies depending on the setting
*5 Dedicated power supply for the monitor specified by KEYENCE.
*6 Select either the Limits mode or the Binary mode.
*7 Select either the Distance mode or the Profile mode. (Distance mode is only available with the LT-9501HSO (5654)
and LT-9001HSO (5655).)
The rating of the NPN open-collector output is 30 mA (30 V or lower) maximum, and residual voltage is 0.5 V.
The rating of the Non-voltage input is ON voltage 1 V or lower, and OFF current 0.6 mA or lower.

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