Wide Scanning Feature Increases Measurement Stability and Versatility
The 0.08 Mil (2-μm) laser beam spot can be scanned horizontally for up to 44 Mil (1100 μm) by using the high-accuracy oscillating mechanism. This new scanning method enables measurements of profile, angle, and area.
The scanning width of the laser beam can be changed freely according to the application and the surface condition of the target. In addition, highly stable displacement measurements are ensured by calculating the scanning data.