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          Micro-head Spectral-interference Laser Displacement Meter

          SI-F series

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          Model

          SI-F01

          SI-F10

          SI-F80

          Type

          Micro-head type Sensor head

          Long distance type Sensor head

          Thickness measurement type Sensor head

          Measurement range

          0.05 to 1.1 mm 0.002" to 0.04" *1

          11.3 to 12.35 mm 0.04" to 0.49" *1

          0.05 to 1.1 mm 0.002" to 0.04" *6
          (Possible detection distance : 80 to 81.1 mm 3.15" to 3.19")

          Light source

          Infrared SLD Central wavelength 820 nm Output 0.6 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2)

          Spot diameter

          ø20 µm ø0.000787"*3

          ø40 µm ø0.001575"*3

          ø20 µm ø0.000787"*3

          Linearity

          ±0.3 µm ±0.000012"*4

          ±0.3 µm ±0.000012"*7

          Resolution

          0.25 µm 0.00000984"*5

          Sampling cycle

          200 µs

          Light source for guide

          Red semiconductor laser Wavelength 655 nm Output 0.1 mW Class 1 Laser product (IEC60825-1/FDA (CDRH) Part 1040.10*2)

          LED display

          Target near center of measurement range: green lights. Target within measurement range: orange lights. Target outside measurement range: Flashes orange.

          Temperature fluctuation

          0.01% of F.S./°C

          Environmental resistance

          Enclosure rating

          IP67

          IP64

          Ambient light

          Incandescent lamp or Fluorescent lamp: 10,000 lux max.

          Ambient temperature

          0 to +85 °C 32 to 185 °F

          0 to +40 °C 32 to 104 °F

          0 to +50 °C 32 to 122 °F

          Relative humidity

          35 to 85 % RH (No condensation)

          Vibration resistance

          10 to 55 Hz, Double amplitude 1.5 mm 0.06", 2 hours in each of the X, Y, and Z directions

          Material

          SUS

          Material

          Sensor head

          Spectrum unit

          Polycarbonate

          Weight

          Approx. 24 g (including cable)

          Approx. 38 g (including cable)

          Approx. 39 g (including cable)

          *1 Indicates distance from the front of the sensor head. For long distance type sensor heads there is an individual difference of up to ±0.2 mm ±0.01".
          *2 The laser classification for FDA (CDRH) is implemented based on IEC60825-1 in accordance with the requirements of Laser Notice No. 50.
          *3 Indicates the minimum beam spot diameter within the measurement range.
          *4 This value is obtained when the measurement target is a glass plate with the number of averaging measurements set to 256.
          *5 This value is obtained by measuring a glass plate surface located at the center of the measurement range with the number of averaging measurements set to 4,096.
          *6 The thickness measurement type sensor head displays the measurement range for the distance between plates of glass. Ensure that the measurement target is within the possible detection distance range.
          *7 This value is obtained by measuring the gap between two glass plates with the number of averaging measurements set to 256.

          Model

          SI-F1001V

          SI-FA100*3

          Separate type

          SI-F1001/SI-FD500

          SI-FA100

          Type

          Built-in main controller type

          Expansion controller*4

          No. of connectable spectrum units

          2

          1

          Display

          Minimum display unit

          0.001 µm

          N/A

          Display range

          ±999.999 µm to ±9999.99 mm (7 settings selectable)

          Display cycle

          10 times/sec.

          Terminal block

          Laser remote interlock input

          Non-voltage input*1

          N/A*1

          TIMING1 input

          RESET1 input

          Auto-zero1 input

          Laser control input

          Analog voltage output

          ±10 V x 2 outputs, Output impedance: 100 Ω*1

          ±10 V x 1 output, Output impedance: 100 Ω*1

          Analog current output

          4 to 20 mA x 2 outputs, Maximum load resistance: 350 Ω*1

          4 to 20 mA x 1 output, Maximum load resistance: 350 Ω*1

          Alarm output

          NPN open-collector output (N.C.)*1

          N/A*1

          General comparator output

          NPN open-collector output*1

          Expansion connector

          TIMING2 input

          Non-voltage input*1

          RESET input

          Auto-zero input

          Program switch input

          Non-voltage input x 3 inputs*1

          Alarm output

          NPN open-collector output (N.C.)*1

          Comparator/ binary output

          Binary output

          Measured value data output (21 bits) OUT selectable NPN open-collector output*1

          Strobe output

          NPN open-collector output*1

          Binary selection output

          Binary selection input

          Non-voltage input*1

          RS-232C interface

          Measured data output and control input/output (Baud rate selectable to 115,200 bps max.)

          N/A

          USB interface

          USB 2.0 high speed compliant (USB 1.1 Full-SPEED compatible)

          Ethernet interface

          100Base-TX/10Base-T

          Major functions

          12 Out simultaneous measurement
          calculation, average, filter, scaling measurement, measured value alarm, tolerance setting, auto-zero, data storage, light monitor, 8-program memory,
          interferometer mode, mask, connection of setting support software, etc.

          Rating

          Power voltage

          24 VDC ±10 %, Ripple (P-P) 10 % or less

          Supplied from the main controller

          Current consumption

          One head connected: 0.6 A or less. Six heads connected: 1.5 A or less.

          Environmental resistance

          Ambient temperature

          0 to +50 °C 32 to 122 °F*2

          Relative humidity

          35 to 85 % RH (No condensation)

          Vibration resistance

          10 to 55 Hz, Double amplitude 0.5 mm 0.02", 2 hours in each of the X, Y, and Z directions

          Weight

          Approx. 600 g

          Approx. 300 g

          *1 • NPN open-collector output rating: 50 mA max. (40 V max.), Residual voltage: 0.5 V max.
          • Non-voltage input rating: ON voltage: 1 V max., OFF current: 0.6 mA max.
          • Part of the input/output circuit of the SI Series is internally common. Be careful that no potential difference is generated between the internally common terminals due to the potential difference between the cables/external
          devices. For details, refer to "Precautions on wiring".
          *2 When two or more expansion controllers are connected, the ambient temperature is 0 to +40 °C 32 to 104 °F.
          *3 The SI-F1003 can be used independently, The measured value display and setting change can be done with the display panel(SI-FD500) and setup support software(SI-H3).
          *4 Up to four expansion controllers can be connected to the main controller.

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